CMOS Cantilever Sensor Systems - Atomic Force Microscopy and Gas Sensing Applications (Hardcover, 2002 ed.)

This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Series:	Microtechnology and MEMS
Release date:	July 2002
First published:	2002
Authors:	D. Lange • O. Brand • H. Baltes
Dimensions:	235 x 155 x 14mm (L x W x T)
Format:	Hardcover
Pages:	142
Edition:	2002 ed.
ISBN-13:	978-3-540-43143-5
Categories:	Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Science & Mathematics > Physics > Applied physics & special topics > General
LSN:	3-540-43143-8
Barcode:	9783540431435

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