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Low-Energy Ion Irradiation of Solid Surfaces (Paperback, Softcover reprint of the original 1st ed. 1999)
Loot Price: R1,472
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Low-Energy Ion Irradiation of Solid Surfaces (Paperback, Softcover reprint of the original 1st ed. 1999)
Series: Springer Tracts in Modern Physics, 146
Expected to ship within 10 - 15 working days
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The book presents an overview on important aspects of ion
irradiation of surfaces, emphasizing low impact energies.
Specifically, ion penetration and implantation into solids, defect
creation and amorphization of semiconductors, sputtering of
elemental and multicomponent targets, and ionization processes of
emitted species are discussed. It provides a synoptic view of these
phenomena which are strongly interrelated by the same basic
processes, but are often described separately and in diverging
terminology. The book tries to bridge this gap, summarizing results
from experiments, computer simulations and theoretical approaches.
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