Mechanical Microsensors (Hardcover, 2001 ed.)

This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors requires interdisciplinary teamwork, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. The reader is guided through the micromachining fabrication process. A chapter on microsensor packaging completes the discussion of technological problems. The description of the basic physics required for sensor design includes the mechanics of deformation and the piezoresistive transduction to electrical signals. There is also a comprehensive discussion of resonant sensors, the hydrodynamics and heat transfer relevant for flow sensors, and, finally, electronic interfacing and readout circuitry. Numerous up-to-date case studies are presented, together with the working, fabrication and design of the sensors.

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Series:	Microtechnology and MEMS
Release date:	November 2000
First published:	2001
Authors:	M. Elwenspoek • R. Wiegerink
Dimensions:	235 x 155 x 19mm (L x W x T)
Format:	Hardcover
Pages:	295
Edition:	2001 ed.
ISBN-13:	978-3-540-67582-2
Categories:	Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Mechanical engineering & materials > Mechanical engineering > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > General Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture > General Promotions
LSN:	3-540-67582-5
Barcode:	9783540675822

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