Process Variations in Microsystems Manufacturing (Hardcover, 1st ed. 2020)

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

General

Imprint:	Springer Nature Switzerland AG
Country of origin:	Switzerland
Series:	Microsystems and Nanosystems
Release date:	April 2020
First published:	2020
Authors:	Michael Huff
Dimensions:	235 x 155mm (L x W)
Format:	Hardcover
Pages:	521
Edition:	1st ed. 2020
ISBN-13:	978-3-03-040558-8
Categories:	Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Mechanical engineering & materials > Production engineering > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Circuits & components Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture > General
LSN:	3-03-040558-3
Barcode:	9783030405588

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