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Process Variations in Microsystems Manufacturing (Hardcover, 1st ed. 2020)
Loot Price: R4,667
Discovery Miles 46 670
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Process Variations in Microsystems Manufacturing (Hardcover, 1st ed. 2020)
Series: Microsystems and Nanosystems
Expected to ship within 10 - 15 working days
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This book thoroughly examines and explains the basic processing
steps used in MEMS fabrication (both integrated circuit and
specialized micro machining processing steps. The book places an
emphasis on the process variations in the device dimensions
resulting from these commonly used processing steps. This will be
followed by coverage of commonly used metrology methods, process
integration and variations in material properties, device parameter
variations, quality assurance and control methods, and design
methods for handling process variations. A detailed analysis of
future methods for improved microsystems manufacturing is also
included. This book is a valuable resource for practitioners,
researchers and engineers working in the field as well as students
at either the undergraduate or graduate level.
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