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Books > Professional & Technical > Energy technology & engineering > Electrical engineering
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Microsystem Design (Paperback, Softcover reprint of the original 1st ed. 2001)
Loot Price: R2,767
Discovery Miles 27 670
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Microsystem Design (Paperback, Softcover reprint of the original 1st ed. 2001)
Expected to ship within 18 - 22 working days
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The goal of this book is to bring together into one accessible text
the fundamentals of the many disciplines needed by today's engineer
working in the field of microelectromechanical systems (MEMS). The
subject matter is wide-ranging: microfabrication, mechanics, heat
flow, electronics, noise, and dynamics of systems, with and without
feedback. Because it is very difficult to enunciate principles of
'good design' in the abstract, the book is organized around a set
of Case Studies that are based on real products, or, where
appropriately well-documented products could not be found, on
thoroughly published prototype work. The Case Studies were selected
to sample a multidimensional space: different manufacturing and
fabrication methods, different device applications, and different
physical effects used for transduction. The Case Study subjects
are: the design and packaging of a piezoresistive pressure sensor,
a capacitively-sensed accelerometer, a quartz
piezoelectrically-driven and sensed rate gyroscope, two
electrostatically-actuated optical projection displays, two
microsystems for the amplification of DNA, and a catalytic sensor
for combustible gases.This book is used for a graduate course in
'Design and Fabrication of Microelectromechanical Devices (MEMS)'
at the Massachusetts Institute of Technology. It is appropriate for
textbook use by senior/graduate courses in MEMS, and will be a
useful reference for the active MEMS professional. Each chapter is
supplemented with homework problems and suggested related reading.
In addition, the book is supported by a web site that will include
additional homework exercises, suggested design problems and
related teaching materials, and software used in the textbook
examples and homework problems.
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