Nanoimprint Lithography: An Enabling Process for Nanofabrication (Paperback, Softcover reprint of the original 1st ed. 2013)

Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application. This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology. Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Release date:	August 2016
First published:	2013
Authors:	Weimin Zhou
Dimensions:	235 x 155 x 14mm (L x W x T)
Format:	Paperback
Pages:	249
Edition:	Softcover reprint of the original 1st ed. 2013
ISBN-13:	978-3-662-51086-5
Languages:	English
Subtitles:	English
Categories:	Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > General
LSN:	3-662-51086-3
Barcode:	9783662510865

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