This second edition of Nanofabrication is one of the most
comprehensive introductions on nanofabrication technologies and
processes. A practical guide and reference, this book introduces
readers to all of the developed technologies that are capable of
making structures below 100nm. The principle of each technology is
introduced and illustrated with minimum mathematics involved. Also
analyzed are the capabilities of each technology in making
sub-100nm structures, and the limits of preventing a technology
from going further down the dimensional scale. This book provides
readers with a toolkit that will help with any of their
nanofabrication challenges.
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