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Books > Science & Mathematics > Physics > Applied physics & special topics
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CMOS Cantilever Sensor Systems - Atomic Force Microscopy and Gas Sensing Applications (Paperback, Softcover reprint of the original 1st ed. 2002)
Loot Price: R2,410
Discovery Miles 24 100
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CMOS Cantilever Sensor Systems - Atomic Force Microscopy and Gas Sensing Applications (Paperback, Softcover reprint of the original 1st ed. 2002)
Series: Microtechnology and MEMS
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This book is intended for scientists and engineers in the field of
micro- and nano electro-mechanical systems (MEMS and NEMS) and
introduces the development of cantilever-based sensor systems using
CMOS-compatible micromachining from the design concepts and
simulations to the prototype. It is also a useful resource for
researchers on cantilever sensors and resonant sensors in general
The reader will become familiar with the potential of the
combination of two technological approaches: IC fabrication
technology, notably CMOS technology, and silicon micromachining and
the resulting microstructures such as cantilever beams. It was
recognized early that these two technologies should be merged in
order to make the microstructures smart and devise integrated
microsystems with on-chip driving and signal conditioning circuitry
- now known as CMOS MEMS or, with the arrival of nanostructures,
CMOS NEMS. One way to achieve the merger is the post-processing
micro- or nano- machining of finished CMOS wafers, some of which is
described in this book. The book introduces this approach based on
work carried out at the Physical Electronics Laboratory of ETH
Zurich on arrays of cantilever transducers with on-chip driving and
signal conditioning circuitry. These cantilevers are familiar from
Scanning Probe Microscopy (SPM) and allow the sensitive detection
of phys ical quantities such as forces and mass changes. The book
is divided into three parts. First, general aspects of cantilever
resona tors are introduced, e. g. their resonant behavior and
possible driving and sensing mechanisms."
General
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