Temperature Measurement during Millisecond Annealing - Ripple Pyrometry for Flash Lamp Annealers (Paperback, 1st ed. 2015)

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

General

Imprint:	Springer
Country of origin:	Netherlands
Series:	MatWerk
Release date:	2016
First published:	2015
Authors:	Denise Reichel
Dimensions:	210 x 148 x 8mm (L x W x T)
Format:	Paperback
Pages:	112
Edition:	1st ed. 2015
ISBN-13:	978-3-658-11387-2
Categories:	Books > Science & Mathematics > Physics > Thermodynamics & statistical physics > Thermodynamics Books > Professional & Technical > Mechanical engineering & materials > Materials science > General Books > Science & Mathematics > Chemistry > Analytical chemistry > Qualitative analytical chemistry > Chemical spectroscopy, spectrochemistry > General
LSN:	3-658-11387-1
Barcode:	9783658113872

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