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Erosion and Growth of Solids Stimulated by Atom and Ion Beams (Paperback, Softcover reprint of the original 1st ed. 1986)
Loot Price: R1,615
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Erosion and Growth of Solids Stimulated by Atom and Ion Beams (Paperback, Softcover reprint of the original 1st ed. 1986)
Series: NATO Science Series E:, 112
Expected to ship within 10 - 15 working days
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The members of the organising Committee and their colleagues have,
for many years been investigating the evol ution of the
fas'cinating surface features which develop during sputtering
erosion of solids. Such experimental, theoretical and computational
studies have also been carried out in many international
laboratories and, as well as much cow onality and agreement,
substantial disagreements were unresolved. In view of the
increasing importance of such processes in technological
applications such as microlitho graphic etching for the patterning
of solid state devices and in fusion technology it was felt
opportune to hold a meeting in this area. Furthermore the use of
energetic atomic and ion fluxes is also becoming of increasing
importance in assisting or modifying the growth of thin films in a
number of important industrial processes and it was therefore
rational to combine the, study of both erosional and growth
processes in a single meeting. These proceedings include 16 invited
review and 15 oral or poster presented contributions to the NATO
Advanced Study Institute on the "Erosion and Growth of Solids
Stimulated by Atom and Ion Beams." The review contributions span
the range from the fundamental concepts of ballistic sputtering,
and how this influences surface morphology evolution, through
processes involving entrapment of incident species to mechanisms
involved in'the use of chemically reactive ion species. Further
reviews outline the influence of energetic irradiation upon surface
growth by atomic deposition whilst others discuss technologkal
applications of both areas of growth and erosion."
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