Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films (Paperback, Softcover reprint of hardcover 1st ed. 2004)

Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed.
This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

General

Imprint:	Springer-Verlag New York
Country of origin:	United States
Release date:	December 2010
First published:	2004
Authors:	Jeffrey B. Fortin • Toh-Ming Lu
Dimensions:	235 x 155 x 7mm (L x W x T)
Format:	Paperback
Pages:	102
Edition:	Softcover reprint of hardcover 1st ed. 2004
ISBN-13:	978-1-4419-5413-8
Categories:	Books > Science & Mathematics > Physics > States of matter > Condensed matter physics (liquids & solids) Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Industrial chemistry > General Books > Professional & Technical > Mechanical engineering & materials > Materials science > Testing of materials > General Promotions
LSN:	1-4419-5413-9
Barcode:	9781441954138

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