MEMS and Nanotechnology, Volume 4 represents one of eight volumes of technical papers presented at the Society for Experimental Mechanics Annual Conference on Experimental and Applied Mechanics, held at Uncasville, Connecticut, June 13-16, 2011. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Mechanics of Biological Systems and Materials, Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials; Optical Measurements, Modeling and, Metrology; Experimental and Applied Mechanics, Thermomechanics and Infra-Red Imaging, and Engineering Applications of Residual Stress.

This book clearly demonstrates the progression of nanoparticle therapeutics from basic research to applications. This book, unlike others covering nanoparticles used in medical applications, presents the medical challenges that can be reduced or even overcome by recent advances in nanoscale drug delivery. Each chapter highlights recent progress in the design and engineering of select multifunctional nanoparticles with topics covering targeting, imaging, delivery, diagnostics, and therapy.

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Amorphous Silicon/Crystalline Silicon Solar Cells deals with some typical properties of heterojunction solar cells, such as their history, the properties and the challenges of the cells, some important measurement tools, some simulation programs and a brief survey of the state of the art, aiming to provide an initial framework in this field and serve as a ready reference for all those interested in the subject. This book helps to "fill in the blanks" on heterojunction solar cells. Readers will receive a comprehensive overview of the principles, structures, processing techniques and the current developmental states of the devices. Prof. Dr. Wolfgang R. Fahrner is a professor at the University of Hagen, Germany and Nanchang University, China.

Interfaces between dissimilar materials are met everywhere in microelectronics and microsystems. In order to ensure faultless operation of these highly sophisticated structures, it is mandatory to have fundamental understanding of materials and their interactions in the system. In this difficult task, the "traditional" method of trial and error is not feasible anymore; it takes too much time and repeated efforts. In Interfacial Compatibility in Microelectronics, an alternative approach is introduced. In this revised method four fundamental disciplines are combined: i) thermodynamics of materials ii) reaction kinetics iii) theory of microstructures and iv) stress and strain analysis. The advantages of the method are illustrated in Interfacial Compatibility in Microelectronics which includes: solutions to several common reliability issues in microsystem technology, methods to understand and predict failure mechanisms at interfaces between dissimilar materials and an approach to DFR based on deep understanding in materials science, rather than on the use of mechanistic tools, such as FMEA. Interfacial Compatibility in Microelectronics provides a clear and methodical resource for graduates and postgraduates alike.

Regular Nanofabrics in Emerging Technologies gives a deep insight into both fabrication and design aspects of emerging semiconductor technologies, that represent potential candidates for the post-CMOS era. Its approach is unique, across different fields, and it offers a synergetic view for a public of different communities ranging from technologists, to circuit designers, and computer scientists. The book presents two technologies as potential candidates for future semiconductor devices and systems and it shows how fabrication issues can be addressed at the design level and vice versa. The reader either for academic or research purposes will find novel material that is explained carefully for both experts and non-initiated readers. Regular Nanofabrics in Emerging Technologies is a survey of post-CMOS technologies. It explains processing, circuit and system level design for people with various backgrounds.

Among the most promising techniques to handle small objects at the micrometer scale are those that employ electrical forces, which have the advantages of voltage-based control and dominance over other forces. The book provides a state-of-the-art knowledge on both theoretical and applied aspects of the electrical manipulation of colloidal particles and fluids in microsystems and covers the following topics: dielectrophoresis, electrowetting, electrohydrodynamics in microsystems, and electrokinetics of fluids and particles. The book is addressed to doctoral students, young or senior researchers, chemical engineers and/or biotechnologists with an interest in microfluidics, lab-on-chip or MEMS.

Humanhairisananocompositebiological?ber. Maintainingthehealth,feel,shine, color,softness,andoverallaestheticsofthehairishighlydesired. Haircarepr- ucts such as shampoos and conditioners, along with damaging processes such as chemical dyeing and permanent wave treatments, affect the maintenance and groomingprocessandareimportanttostudybecausetheyaltermanyhairprop- ties. Nanoscalecharacterizationofthecellularstructure,mechanicalproperties,and morphological, frictional,andadhesive properties(tribologicalproperties)ofhair areessentialtoevaluateanddevelopbettercosmeticproductsandtoadvancethe understandingofbiologicalandcosmeticscience. Theatomic/frictionforcemic- scope(AFM/FFM)andnanoindenterhavebecomeimportanttoolsforstudyingthe micro/nanoscalepropertiesofhumanhair. Inthisbook,wepresentacomprehensive review of structural, nanomechanical, and nanotribological properties of various hairandskinasafunctionofethnicity,damage,conditioningtreatment,andvarious environments. Variouscellularstructuresofhumanhairand?nesublamellarstr- turesofthecuticleareidenti?edandstudied. Nanomechanicalpropertiessuchas hardness,elasticmodulus,tensiledeformation,fatigue,creep,andscratchresistance arediscussed. Nanotribologicalpropertiessuchasroughness,friction,andadhesion are presented, as well as investigations of conditioner distribution, thickness, and bindinginteractions. Tounderstandtheelectrostaticchargebuilduponhair,surface potentialstudiesarealsopresented. Thebookshouldserveasareferencebookonthebiophysicsofhumanhairand hairtreatments. TheresearchreportedinthisbookwassupportedbyProcter&GambleCo. in Cincinnati,Ohio,andKobe,Japan. IwouldliketothankCarmenLaTorrewhohad assistedinvariouspublicationsonhairresearch. Iwouldalsoliketothankmywife Sudha,whohasbeenforbearingduringthepreparationofthisbook. Powell,OH BharatBhushan November2010 v Contents 1 Introduction-Human Hair, Skin, and Hair Care Products...1 1. 1 HumanHair ...1 1. 1. 1 TheCuticle ...3 1. 1. 2 TheCortexandMedulla...6 1. 2 Skin...7 1. 3 HairCare:CleaningandConditioningTreatments,andDamaging Processes ...10 1. 3. 1 CleaningandConditioningTreatments:Shampoo andConditioner...13 1. 3. 2 DamagingProcesses...18 1. 4 OrganizationoftheBook ...19 2 Experimental Methods...21 2. 1 ExperimentalApparatuses...23 2. 2 ExperimentalProcedure ...26 2. 2. 1 StructuralCharacterizationUsinganAFM...26 2. 2. 2 SurfacePotentialStudiesUsingAFM-Based KelvinProbeMicroscopy...29 2. 2. 3 NanomechanicalCharacterizationUsingNanoindentation ...30 2. 2. 4 InSituTensileDeformationCharacterizationUsingAFM ...32 2. 2. 5 Macroscale Tribological Characterization UsingaFrictionTestApparatus...33 2. 2. 6 Micro/nanotribologicalCharacterizationUsinganAFM...35 2. 3 HairandSkinSamples ...41 3 Structural Characterization Using an AFM ...45 3. 1 StructureofHairCrossSectionandLongitudinalSection ...45 3. 1. 1 CrossSectionofHair...45 3. 1. 2 LongitudinalSectionofHair...45 3. 2 StructureofVariousCuticleLayers...48 3. 2. 1 VirginHair...48 vii viii Contents 3. 2. 2 ChemicallyDamagedHair...50 3. 2. 3 Conditioner-TreatedHair...52 3. 2. 4 EffectofHumidityonMorphologyandCellularStructure ofHairSurface...54 3. 3 Summary...55 4 Nanomechanical Characterization Using Nanoindentation, Nanoscratch, and AFM...57 4. 1 Hardness,Young'sModulus,andCreep...

In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.

The intersection of nanostructured materials with photonics and electronics shows great potential for clinical diagnostics, sensors, ultrafast telecommunication devices, and a new generation of compact and fast computers. Nanophotonics draws upon cross-disciplinary expertise from physics, materials science, chemistry, electrical engineering, biology, and medicine to create novel technologies to meet a variety of challenges. This is the first book to focus on novel materials and techniques relevant to the burgeoning area of nanoscale photonics and optoelectronics, including novel-hybrid materials with multifunctional capabilities and recent advancements in the understanding of optical interactions in nanoscale materials and quantum-confined objects. Leading experts provide a fundamental understanding of photonics and the related science and technology of plasmonics, polaritons, quantum dots for nanophotonics, nanoscale field emitters, near-field optics, nanophotonic architecture, and nanobiophotonic materials.

"Radioisotope Thin-Film Powered Microsystems" describes high energy density microbatteries required for compact long lifetime wireless sensor Microsystems. These microbatteries are presented alongside theories employing high energy density radioisotope thin films in actuating novel electromechanical energy converters. Also discussed are novel wireless sensor architectures that enable long lifetime wireless sensors Microsystems with minimal amounts of radioisotope fuel used. Ultra low-power beta radiation counting clocks are described in order to illustrate the application of radioisotope thin films in realizing the deployment of various components of Microsystems. "Radioisotope Thin-Film Powered Microsystems" also presents the latest work on 3D silicon electrovoltaic converters and energy density microbatteries required for high-power Microsystems.

-On the Mechanisms Leading to Exfoliated Nanocomposites Prepared by Mixing By C. D. Han -Phase Behavior and Phase Transitions in AB- and ABA-type Microphase-Separated Block Copolymers By J. K. Kim, C. D. Han -New Class Materials of Organic-Inorganic Hybridized Nanocrystals/Nanoparticles, and Their Assembled Microand Nano-Structure Toward Photonics By H. Oikawa, T. Onodera, A. Masuhara, H. Kasai, H. Nakanishi -Poly(substituted Methylene) Synthesis: Construction of C-C Main Chain from One Carbon Unit By E. Ihara

-Shear-Induced Transitions and Instabilities in Surfactant Wormlike Micelles By S. Lerouge, J.-F. Berret -Laser-Interferometric Creep Rate Spectroscopy of Polymers By V. A. Bershtein, P. N. Yakushev -Polymer Nanocomposites for Electro-Optics: Perspectives on Processing Technologies, Material Characterization, and Future Application K. Matras-Postolek, D. Bogdal

Thisbookistalkingabouthowtousesupercriticalwater(SCW)torapidlyproduce micro- and nano-particles of metal oxides, inorganic salts, metals and organics. Itcoversbasicprinciples,experimentalmethodologiesandreactors,particlep- duction,characterizationsandapplicationsaswellastherecentadvancement. Fine particlescanbeproducedbybothchemicalandphysicalprecipitationofproducts from SCW. They can be used as catalysts, materials in ceramics and electronic devices andcompositematerials. Particlesareeasilyproduced continuouslyina owreactorinshortreactiontimes(0. 4s?2min)butcanalsobesynthesizedin batchreactorsforlongreactiontimes(e. g. ,12h). Theycanbeeasilystudiedin-situ microscopically(optical/IR/Raman/SR-XRD)inanopticalmicro-reactor,diamond anvilcell. Thesize,sizedistribution,crystalgrowth&structure,andmorphologyof particlescanbecontrolledbychangingtheconcentrationsofstatingmaterials,pH, pressures,temperatures,heating&coolingrates,organicmodi cations,reducingor oxidizingatmospheres, owratesandreactiontimes. Thisisthe rstbooktosystematicallyintroduceusingSCWforproductionof neparticles. Itisanidealreferencebookforengineers,researchersandgraduate studentsinmaterialscienceandengineering. vii Acknowledgments I would like to thank Drs. T. Ogi & T. Minowa (Biomass Technology Research Center,NationalInstituteofAdvancedIndustrialScienceandTechnology,Japan), and Profs. K. Arai, H. Inomata, R. L. Smith Jr. and T. Adschiri (Chemical Engineering,TohokuUniversity,Japan),whoinitiallyintroducedthehydrothermal andsupercritical uidsareastomewhenIworkedinJapanfrom1996to1999. Thanks are also due to Profs. J. A. Kozinski, R. I. L. Guthrie (Materials Engineering,McGillUniversity,Canada)andI. S. Butler(Chemistry,McGill)for theirguidanceinmyworkonhydrothermalprocessduringmyworkinCanadafrom 1999to2007. Profs. W. Bassett (Geological Sciences, Cornell University) and D. Baker (Earth&PlanetarySciences,McGill)forinstructionsregardingDAC,Dr. I-Ming Chou(U. S. GeologicalSurvey)forusefuldiscussionsofthepressurecalculation procedure. Drs. M. Watanabe and T. Sato (Research Center of Supercritical Fluid Technology, Tohoku University, Japan) for discussions about the experimental set-upofthebatchand owreactors. Drs. S. Xu,H. Assaaoudi,R. HashaikehandA. Sobhy,whoworkedwithmeat McGillinCanada. ix Contents 1 Introduction...1 1. 1 Background ...1 1. 2 RapidExpansionofSupercriticalSolution(RESS)Process ...4 1. 3 SupercriticalAntisolvent(SAS)Process ...4 1. 4 OtherPhysicalProcesses ...5 1. 5 SupercriticalWaterProcess ...5 References...8 2 Supercritical Water Process...11 2. 1 Introduction ...11 2. 2 BatchReactor ...15 2. 3 FlowReactor...18 2. 4 DiamondAnvilCell(DAC)...20 References...25 3 Metal Oxides Synthesis...29 3. 1 Introduction ...29 3. 2 Boehmite(AlOOH) ...30 3. 3 Ferrites...31 3. 4 Phosphor(YAG) ...32 3. 5 LiCoO /LiMn O ...33 2 2 4 3. 6 Ce Zr O (x =0?1)...33 1?x x 2 3. 7 PotassiumHexatitanate,PotassiumNiobateandTitania ...35 3. 8 ZincOxide...38 3. 9 Nickel,Nickel/CobaltOxide...

The merging of the concept of introduction of asymmetry of the wave vector space of the charge carriers in semiconductors with the modern techniques of fabric- ing nanostructured materials such as MBE, MOCVD, and FLL in one, two, and three dimensions (such as ultrathin ?lms, nipi structures, inversion and accumu- tion layers, quantum well superlattices, carbon nanotubes, quantum wires, quantum wire superlattices, quantumdots, magnetoinversionand accumulationlayers, qu- tum dot superlattices, etc. ) spawns not only useful quantum effect devices but also unearth new concepts in the realm of nanostructured materials science and related disciplines. It is worth remaking that these semiconductor nanostructures occupy a paramount position in the entire arena of low-dimensional science and technology by their own right and ?nd extensive applications in quantum registers, resonant tunneling diodes and transistors, quantum switches, quantum sensors, quantum logic gates, heterojunction ?eld-effect, quantum well and quantum wire trans- tors, high-speed digital networks, high-frequency microwave circuits, quantum cascade lasers, high-resolution terahertz spectroscopy, superlattice photo-oscillator, advanced integrated circuits, superlattice photocathodes, thermoelectric devices, superlattice coolers, thin ? lm transistors, intermediate-band solar cells, micro- tical systems, high-performanceinfrared imaging systems, bandpass ?lters, thermal sensors, optical modulators, optical switching systems, single electron/molecule electronics, nanotube based diodes, and other nanoelectronic devices.

The synergism of the mechanics of nondestructive testing and the mechanics of materials response has great potential value in an era of rapid development of new materials and new applications for con ventional materials. The two areas are closely related and an advance in one area often leads to an advance in the other. As our understanding of basic principles increases, nondestructive testing is outgrowing the image of "black box techniques" and is rapidly becoming a legitimate technical area of science and engineering. At the present time, however, an understanding of the mechanics of nondestructive testing is lagging behind other advances in the field. The key to further development in the mechanics of nondestructive testing lies in the mechanics of the phenomena or response being investigated - a better understanding of materials response suggests better nondestructive test methods to investigate the response which, in turn, advances our understanding of materials response, and so on. With this approach in mind, the Materials Response Group of the Engineering Science and Mechanics Department at Virginia Polytechnic Institute and State University hosted a Conference on the Mechanics of Nondestructive Testing on September 10 through 12, 1980. Sponsors of the conference were the Army Research Office, the National Science Foundation, and the Engineering Science and Mechanics Department."

This book is devoted to a wide range of problems concerning applications of nanomaterials and nanodevices as effective solutions to modern ecological problems. Leading experts in nanoscience and nanotechnology present the key theoretical, experimental and implementation issues related to the creation and utilization of novel nanoscale devices to help ensure ecological security. The authors discuss appropriate nanotechnologies for minimizing various types of risk: to human life, technogenic risk, or indeed terrorist threats. Particular emphasis is placed on defining and studying the required materials properties, and - in the field - on nanoscale devices for sensors and monitoring.

The development of new-generation micro-manufacturing technologies and systems has revolutionised the way products are designed and manufactured today with a s- nificant impact in a number of key industrial sectors. Micro-manufacturing techno- gies are often described as disruptive, enabling and interdisciplinary leading to the creation of whole new classes of products that were previously not feasible to ma- facture. While key processes for volume manufacture of micro-parts such as mach- ing and moulding are becoming mature technologies, micro-assembly remains a key challenge for the cost-effective manufacture of complex micro-products. The ability to manufacture customizable micro-products that can be delivered in variable volumes within relatively short timescales is very much dependent on the level of development of the micro-assembly processes, positioning, alignment and measurement techniques, gripping and feeding approaches and devices. Micro-assembly has developed rapidly over the last few years and all the pred- tions are that it will remain a critical technology for high-value products in a number of key sectors such as healthcare, communications, defence and aerospace. The key challenge is to match the significant technological developments with a new gene- tion of micro-products that will establish firmly micro-assembly as a mature manuf- turing process. th The book includes the set of papers presented at the 5 International Precision - sembly Seminar IPAS 2010 held in Chamonix, France from the 14th to the 17th February 2010.

This book clearly demonstrates the progression of nanoparticle therapeutics from basic research to applications. This book, unlike others covering nanoparticles used in medical applications, presents the medical challenges that can be reduced or even overcome by recent advances in nanoscale drug delivery. Each chapter highlights recent progress in the design and engineering of select multifunctional nanoparticles with topics covering targeting, imaging, delivery, diagnostics, and therapy.

This Briefs volume describes the properties and structure of elementary excitations in isotope low-dimensional structures. Without assuming prior knowledge of quantum physics, the present book provides the basic knowledge needed to understand the recent developments in the sub-disciplines of nanoscience isotopetronics, novel device concepts and materials for nanotechnology. It is the first and comprehensive interdisciplinary account of the newly developed scientific discipline isotopetronics.

The main intention of the editors of the book is the demonstration of the intrinsic correlation and mutual influence of three important components of nanoscience: new phenomena - nanomaterials - nanodevices. This is the organizing concept of the book. To discover new phenomena it is necessary to develop novel nanotechnological processes for fabrication of nanomaterials. Nanostructures and new phenomena serve as the base for the development of novel nanoelectronic devices and systems. The articles selected for the book illustrate this interrelation.

The discovery of multiwalled carbon nanotubes(CNTs) in 1991 and the subsequent discovery of single-walled CNTs in 1993 have led to a worldwide excitement to explore their fundamental properties and potential device applications. A sing- walled CNT is structurally a sheet of graphene rolled into a seamless tube, which possesses a diameter of the order of a nanometer but a length thousands of times greater. The large aspect ratio and small cross section size make it nearly an ideal, quasi-one-dimensionalsystem, which has provided a concrete context for chemists, physicists,andengineersto collaborativelyworktogetherin the?eld ofnanoscience and nanotechnology. As a result of such efforts in the last two decades, superior electrical, optical, and mechanical properties of CNTs have been theoretically p- dicted and experimentally demonstrated. The unique material properties of CNTs have made it interesting for a variety of applications. For example, depending on the orientation of its graphene lattice relative to the nanotube axis, the CNT can be either metallic or semiconducting. This property makes the material interesting for developing not only nanoscale semiconductor devices but also a new interc- nect technologyto competewith the state-of-theart copperinterconnecttechnology. The property has also imposed yet-solved challenges in the ?eld. For example, one of the major challenges that holds CNTs back from electronic application is how to produce pure all-semiconducting CNTs, based on which a device that can be effectively turned off can be built.

This book focuses on chemical and nanophotonic technology to be used to develop novel nano-optical devices and systems. It begins with temperature- and photo-induced phase transition of ferromagnetic materials. Further topics include: energy transfer in artificial photosynthesis, homoepitaxial multiple quantum wells in ZnO, near-field photochemical etching and nanophotonic devices based on a nonadiabatic process and optical near-field energy transfer, respectively and polarization control in the optical near-field for optical information security. Taken as a whole, this overview will be a valuable resource for engineers and scientists working in the field of nano-electro-optics.

A survey of the machinery and science of the nanometer scale. Its twenty-two contributing authors, drawn from many different disciplines including atomic physics, microelectronics, polymer chemistry, and biophysics, delineate the course of current research and articulate a vision for the development of the nanometer frontiers in electronics, mechanics, chemistry, magnetics, materials, and biology. They reveal a world thirty years hence where motors are smaller than the diameter of a human hair; where single-celled organisms are programmed to fabricate materials with nanometer precision; where single atoms are used for computation, and where quantum chaos is the norm. Aimed at the level of at least a junior- or senior- level undergraduate in biology, chemistry, physics, or engineering.

Trends in Computational Nanomechanics reviews recent advances in analytical and computational modeling frameworks to describe the mechanics of materials on scales ranging from the atomistic, through the microstructure or transitional, and up to the continuum. The book presents new approaches in the theory of nanosystems, recent developments in theoretical and computational methods for studying problems in which multiple length and/or time scales must be simultaneously resolved, as well as example applications in nanomechanics.

This title will be a useful tool of reference for professionals, graduates and undergraduates interested in Computational Chemistry and Physics, Materials Science, Nanotechnology.