Specialty Gas Analysis - A Practical Guidebook (Hardcover)

The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields.

General

Imprint:	John Wiley & Sons
Country of origin:	United States
Release date:	May 1997
First published:	1997
Authors:	JD Hogan
Dimensions:	241 x 159 x 19mm (L x W x T)
Format:	Hardcover
Pages:	200
ISBN-13:	978-0-471-18598-7
Categories:	Books > Science & Mathematics > Physics > States of matter > Condensed matter physics (liquids & solids) Books > Science & Mathematics > Chemistry > Analytical chemistry > General Books > Professional & Technical > Energy technology & engineering > Fossil fuel technologies > Gas technology
LSN:	0-471-18598-1
Barcode:	9780471185987

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