Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon (Paperback, Softcover reprint of the original 1st ed. 2004)

This book contains the first comprehensive review of intrinsic point defects, impurities and their complexes in silicon. Besides compiling the structures, energetic properties, identified electrical levels and spectroscopic signatures, and the diffusion behaviour from investigations, it gives a comprehensive introduction into the relevant fundamental concepts.

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