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Books > Science & Mathematics > Physics > States of matter > Plasma physics
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Plasma Electronics - Applications in Microelectronic Device Fabrication (Paperback, 2nd edition)
Loot Price: R2,274
Discovery Miles 22 740
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Plasma Electronics - Applications in Microelectronic Device Fabrication (Paperback, 2nd edition)
Expected to ship within 12 - 17 working days
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Beyond enabling new capabilities, plasma-based techniques,
characterized by quantum radicals of feed gases, hold the potential
to enhance and improve many processes and applications. Following
in the tradition of its popular predecessor, Plasma Electronics,
Second Edition: Applications in Microelectronic Device Fabrication
explains the fundamental physics and numerical methods required to
bring these technologies from the laboratory to the factory.
Emphasizing computational algorithms and techniques, this updated
edition of a popular monograph supplies a complete and up-to-date
picture of plasma physics, computational methods, applications, and
processing techniques. Reflecting the growing importance of
computer-aided approaches to plasma analysis and synthesis, it
showcases recent advances in fabrication from micro- and
nano-electronics, MEMS/NEMS, and the biological sciences. A helpful
resource for anyone learning about collisional plasma structure,
function, and applications, this edition reflects the latest
progress in the quantitative understanding of non-equilibrium
low-temperature plasma, surface processing, and predictive modeling
of the plasma and the process. Filled with new figures, tables,
problems, and exercises, it includes a new chapter on the
development of atmospheric-pressure plasma, in particular microcell
plasma, with a discussion of its practical application to improve
surface efficiency. The book provides an up-to-date discussion of
MEMS fabrication and phase transition between capacitive and
inductive modes in an inductively coupled plasma. In addition to
new sections on the phase transition between the capacitive and
inductive modes in an ICP and MOS-transistor and MEMS fabrications,
the book presents a new discussion of heat transfer and heating of
the media and the reactor. Integrating physics, numerical methods,
and practical applications, this book equips you with the
up-to-date understanding required to scale up lab breakthroughs
into industrial innovations.
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