Flash Lamp Annealing - From Basics to Applications (Paperback, 1st ed. 2019)

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.

General

Imprint:	Springer Nature Switzerland AG
Country of origin:	Switzerland
Series:	Springer Series in Materials Science, 288
Release date:	August 2020
First published:	2019
Authors:	Lars Rebohle • Slawomir Prucnal • Denise Reichel
Dimensions:	235 x 155mm (L x W)
Format:	Paperback
Pages:	288
Edition:	1st ed. 2019
ISBN-13:	978-3-03-023301-3
Categories:	Books > Science & Mathematics > Physics > Optics (light) Books > Professional & Technical > Mechanical engineering & materials > Production engineering > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Microwave technology Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors
LSN:	3-03-023301-4
Barcode:	9783030233013

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