"Mulilayer Integrated Film Bulk Acoustic Resonators" mainly
introduces the theory, design, fabrication technology and
application of a recently developed new type of device, multilayer
integrated film bulk acoustic resonators, at the micro and nano
scale involving microelectronic devices, integrated circuits,
optical devices, sensors and actuators, acoustic resonators,
micro-nano manufacturing, multilayer integration, device theory and
design principles, etc. These devices can work at very high
frequencies by using the newly developed theory, design, and
fabrication technology of nano and micro devices.
Readers in fields of IC, electronic devices, sensors, materials,
and films etc. will benefit from this book by learning the detailed
fundamentals and potential applications of these advanced
devices.
Prof. Yafei Zhang is the director of the Ministry of Education s
Key Laboratory for Thin Films and Microfabrication Technology, PRC;
Dr. Da Chen was a PhD student in Prof. Yafei Zhang s research
group."
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