The properties of Si02 and the Si-Si02 interface provide the key foundation onto which the majority of semiconductor device technology has been built Their study has consumed countless hours of many hundreds of investigators over the years, not only in the field of semiconductor devices but also in ceramics, materials science, metallurgy, geology, and mineralogy, to name a few. These groups seldom have contact with each other even though they often investigate quite similar aspects of the Si02 system. Desiring to facilitate an interaction between these groups we set out to organize a symposium on the Physics and Chemistry of Si()z and the Si-Si()z Interface under the auspices of The Electrochemical Society, which represents a number of the appropriate groups. This symposium was held at the 173rd Meeting of The Electrochemical Society in Atlanta, Georgia, May 15-20, 1988. These dates nearly coincided with the ten year anniversary of the "International Topical Conference on the Physics of Si02 and its Interfaces" held at mM in 1978. We have modeled the present symposium after the 1978 conference as well as its follow on at North Carolina State in 1980. Of course, much progress has been made in that ten years and the symposium has given us the opportunity to take a multidisciplinary look at that progress.

"You, 0 Sun, are the eye of the world You are the soul of all embodied beings You are the source of all creatures You are the discipline of all engaged in work" - Translated from Mahabharata 3rd Century BC Today, energy is the lifeline and status symbol of "civilized" societies. All nations have therefore embarked upon Research and Development pro grams of varying magnitudes to explore and effectively utilize renewable sources of energy. Albeit a low-grade energy with large temporal and spatial variations, solar energy is abundant, cheap, clean, and renewable, and thus presents a very attractive alternative source. The direct conver sion of solar energy to electricity (photovoltaic effect) via devices called solar cells has already become an established frontier area of science and technology. Born out of necessity for remote area applications, the first commercially manufactured solar cells - single-crystal silicon and thin film CdS/Cu2S - were available well over 20 years ago. Indeed, all space vehicles today are powered by silicon solar cells. But large-scale terrestrial applications of solar cells still await major breakthroughs in terms of discovering new and radical concepts in solar cell device structures, utilizing relatively more abundant, cheap, and even exotic materials, and inventing simpler and less energy intensive fabrication processes. No doubt, this extraordinary challenge in R/D has led to a virtual explosion of activities in the field of photovoltaics in the last several years."

The use of diamond for electronic applications is not a new idea. As early as the 1920's diamonds were considered for their use as photoconductive detectors. However limitations in size and control of properties naturally limited the use of diamond to a few specialty applications. With the development of diamond synthesis from the vapor phase has come a more serious interest in developing diamond-based electronic devices. A unique combination of extreme properties makes diamond partiCularly well suited for high speed, high power, and high temperature applications. Vapor phase deposition of diamond allows large area films to be deposited, whose properties can potentially be controlled. Since the process of diamond synthesis was first realized, great progress have been made in understanding the issues important for growing diamond and fabricating electronic devices. The quality of both intrinsic and doped diamond has improved greatly to the point that viable applications are being developed. Our understanding of the properties and limitations has also improved greatly. While a number of excellent references review the general properties of diamond, this volume summarizes the great deal of literature related only to electronic properties and applications of diamond. We concentrate only on diamond; related materials such as diamond-like carbon (DLC) and other wide bandgap semiconductors are not treated here. In the first chapter Profs. C. Y. Fong and B. M. Klein discuss the band structure of single-crystal diamond and its relation to electronic properties.

Recently a new sphere in materials science* has formed which subject is structure and properties of electret materials used in engineering, medicine, biotechnology and other branches. It is characterized by specific methods of experimental investigations based on recording charge transfer, polarization and depolarization of dielectrics and involves original techniques and physico-mathematical aids where notions that exist at the interface of several natural and technical sciences are concentrated. It embraces a vast area of applications mainly in engineering, instrument making, electronics, medical technique, biotechnology, and etc., has a specialized technological base for electric polarization of dielectrics composed of uncommon technological methods, equipment and instrumentation. Apparently, future fundamental investigations in the domain of electret materials science are to be developed at the interface of computer of dielectrics. Elaboration of a simulation, physics and physical chemistry model for electric polarization of solid media with uneven charge density distribution, complicated by surface phenomena, outer electromagnetic, heat, chemical and other effects, presents a grave methodological problem. The simulation of structures in which polarization follows diffusion mechanism of chemically active molecules or their fragments, and the development of calculation methods for polarized charge relaxation and regularities of dielectric nonlinear properties, are the most urgent objectives of current research. Success in bioelectret effect studies is anticipated to result in profound widening of natural science knowledge.

The workshop entitled Magnetic Susceptibility of Superconductors and other Spin Systems (S4) was held at Coolfont Resort and Health Spa. located near Berkley Springs West Virginia on May 20-23. 1991. There were over sixty attendees. approximately half from the United States. the remainder representing over twelve different countries. The international character of the workshop may be gleaned form the attendee list, included in this volume. The intent of the workshop was to bring together those experimentalists and theoreticians whose efforts have resulted in significant recent contributions to the development and use of the ac susceptibility technique as well as to the interpretation of data obtained from these measurements. Many spirited discussions occurred during and after the presentations. These are reflected in the manuscripts contained in these proceedings. Although camera ready manuscripts were required from all participants at registration, all manuscripts were revised and reflect the lively exchanges that followed each presentation. The small size of the workshop allowed the participants a high degree of flexibility. Consequently when a controversial topic such as "the irreversibility line" emerged, a special session was organized on the spot. At the suggestion of Ron Goldfarb, participants were invited to contribute a one page summary containing their thoughts on the topic. These stand alone contributions were retyped and included as submitted, with only minor editorial changes. These proceedings are intended for those experienced scientists new to the field and graduate students just beginning their research.

The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need."

This book is the product of Research Study Group (RSG) 13 on "Human Engineering Evaluation on the Use of Colour in Electronic Displays," of Panel 8, "Defence Applications of Human and Biomedical Sciences," of the NATO Defence Research Group. RSG 13 was chaired by Heino Widdel (Germany) and consisted of Jeffrey Grossman (United States), Jean-Pierre Menu (France), Giampaolo Noja (Italy, point of contact), David Post (United States), and Jan Walraven (Netherlands). Initially, Christopher Gibson (United Kingdom) and Sharon McFaddon (Canada) participated also. Most of these representatives served previously on the NATO program committee that produced Proceedings of a Workshop on Colour Coded vs. Monochrome Displays (edited by Christopher Gibson and published by the Royal Aircraft Establishment, Farnborough, England) in 1984. RSG 13 can be regarded as a descendent of that program committee. RSG 13 was formed in 1987 for the purpose of developing and distributing guidance regarding the use of color on electronic displays. During our first meeting, we discussed the fact that, although there is a tremendous amount of information available concerning color vision, color perception, colorimetry, and color displays-much of it relevant to display design-it is scattered across numerous texts, journals, conference proceedings, and technical reports. We decided that we could fulfill the RSG's purpose best by producing a book that consolidates and summarizes this information, emphasizing those aspects that are most applicable to display design.

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

This book is the second in a series of scientific textbooks designed to cover advances in selected research fields from a basic and general viewpoint, so that only limited knowledge is required to understand the significance of recent developments. Further assistance for the non-specialist is provided by the summary of abstracts in Part 2, which includes many of the major papers published in the research field. Crystal Growth of Semiconductor Materials has been the subject of numerous books and reviews and the fundamental principles are now well-established. We are concerned chiefly with the deposition of atoms onto a suitable surface - crystal growth - and the generation of faults in the atomic structure during growth and subsequent cooling to room temperature - crystal defect structure. In this book I have attempted to show that whilst the fundamentals of these processes are relatively simple, the complexities of the interactions involved and the individuality of different materials systems and growth processes have ensured that experimentally verifiable predictions from scientific principles have met with only limited success - good crystal growth remains an art. However, recent advances, which include the reduction of growth temperatures, the reduction or elimination of reactant transport variables and the use of better-controlled energy sources to promote specific reactions, are leading to simplified growth systems.

The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of 'good design' in the abstract, the book is organized around a set of Case Studies that are based on real products, or, where appropriately well-documented products could not be found, on thoroughly published prototype work. The Case Studies were selected to sample a multidimensional space: different manufacturing and fabrication methods, different device applications, and different physical effects used for transduction. The Case Study subjects are: the design and packaging of a piezoresistive pressure sensor, a capacitively-sensed accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two electrostatically-actuated optical projection displays, two microsystems for the amplification of DNA, and a catalytic sensor for combustible gases.This book is used for a graduate course in 'Design and Fabrication of Microelectromechanical Devices (MEMS)' at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and will be a useful reference for the active MEMS professional. Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.

This Advanced Study Institute on the topic of SOLID STATE MICROBATTERIES is the third and final institute on the general theme of a field of study now termed "SOLID STATE IONICS". The institute was held in Erice, Sicily, Italy, 3 - 15 July 1988. The objective was to assemble in one location individuals from industry and academia expert in the fields of microelectronics and solid state ionics to determine the feasibility of merging a solid state microbattery with microelectronic memory. Solid electrolytes are in principle amenable to vapor deposition, RF or DC sputtering, and other techniques used to fabricate microelectronic components. A solid state microbattery 1 1 mated on the same chip carrier as the chip can provide on board memory backup power. A solid state microbattery assembled from properly selected anode/solid electrolyte/cathode materials could have environmental endurance properties equal or superior to semiconductor memory chips. Lectures covering microelectronics, present state-of-art solid state batteries, new solid electrolyte cathode materials, theoretical and practical techniques for fabrication of new solid electrolytes, and analytical techniques for study of solid electrolytes were covered. Several areas where effort is required for further understanding of materials in pure form and their interactions with other materials at interfacial contact points were identified. Cathode materials for solid state batteries is one particular research area which requires attention. Another is a microscopic model of conduction in vitreous solid electrolytes to enhance the thermodynamic macroscopic Weak ~lectrolyte Iheory (WET).

The field of solid state ionics is multidisciplinary in nature. Chemists, physicists, electrochimists, and engineers all are involved in the research and development of materials, techniques, and theoretical approaches. This science is one of the great triumphs of the second part of the 20th century. For nearly a century, development of materials for solid-state ionic technology has been restricted. During the last two decades there have been remarkable advances: more materials were discovered, modem technologies were used for characterization and optimization of ionic conduction in solids, trial and error approaches were deserted for defined predictions. During the same period fundamental theories for ion conduction in solids appeared. The large explosion of solid-state ionic material science may be considered to be due to two other influences. The first aspect is related to economy and connected with energy production, storage, and utilization. There are basic problems in industrialized countries from the economical, environmental, political, and technological points of view. The possibility of storing a large amount of utilizable energy in a comparatively small volume would make a number of non-conventional intermittent energy sources of practical convenience and cost. The second aspect is related to huge increase in international relationships between researchers and exchanges of results make considerable progress between scientists; one find many institutes joined in common search programs such as the material science networks organized by EEC in the European countries.

"Applications of Finite Element Methods for Reliability Studies" on ULSI Interconnections provides a detailed description of the application of finite element methods (FEMs) to the study of ULSI interconnect reliability. Over the past two decades the application of FEMs has become widespread and continues to lead to a much better understanding of reliability physics.

To help readers cope with the increasing sophistication of FEMs applications to interconnect reliability, "Applications of Finite Element Methods for Reliability Studies on ULSI Interconnections" will: introduce the principle of FEMs;review numerical modeling of ULSI interconnect reliability;describe the physical mechanism of ULSI interconnect reliability encountered in the electronics industry; anddiscuss in detail the use of FEMs to understand and improve ULSI interconnect reliability from both the physical and practical perspective, incorporating the Monte Carlo method.

A full-scale review of the numerical modeling methodology used in the study of interconnect reliability highlights useful and noteworthy techniques that have been developed recently. Many illustrations are used throughout the book to improve the reader s understanding of the methodology and its verification. Actual experimental results and micrographs on ULSI interconnects are also included.

"Applications of Finite Element Methods for Reliability Studies" on ULSI Interconnections is a good reference for researchers who are working on interconnect reliability modeling, as well as for those who want to know more about FEMs for reliability applications. It gives readers a thorough understanding of the applications of FEM to reliability modeling and an appreciation of the strengths and weaknesses of various numerical models for interconnect reliability."

As semiconductor manufacturers implement copper conductors in advanced interconnect schemes, research and development efforts shift toward the selection of an insulator that can take maximum advantage of the lower power and faster signal propagation allowed by copper interconnects. One of the main challenges to integrating a low-dielectric constant (low-kappa) insulator as a replacement for silicon dioxide is the behavior of such materials during the chemical-mechanical planarization (CMP) process used in Damascene patterning. Low-kappa dielectrics tend to be softer and less chemically reactive than silicon dioxide, providing significant challenges to successful removal and planarization of such materials. The focus of this book is to merge the complex CMP models and mechanisms that have evolved in the past decade with recent experimental results with copper and low-kappa CMP to develop a comprehensive mechanism for low- and high-removal-rate processes. The result is a more in-depth look into the fundamental reaction kinetics that alter, selectively consume, and ultimately planarize a multi-material structure during Damascene patterning.

Emerging Memories: Technologies and Trends attempts to provide background and a description of the basic technology, function and properties of emerging as well as discussing potentially suitable applications. This book explores a range of new memory products and technologies. The concept for some of these memories has been around for years. A few completely new. Some involve materials that have been in volume production in other type of devices for some time. Ferro-electrics, for example, have been used in capacitors for more than 30 years. In addition to looking at using known devices and materials in novel ways, there are new technologies being investigated such as DNA memories, light memories, molecular memories, and carbon nanotube memories, as well as the new polymer memories which hold the potential for the significant manufacturing reduction. Emerging Memories: Technologies and Trends is a useful reference for the professional engineer in the semiconductor industry.

With the development in the 1960s of ultrahigh vacuum equipment and techniques and electron, X-ray, and ion beam techniques to determine the structure and composition of interfaces, activities in the field of surface science grew nearly exponentially. Today surface science impacts all major fields of study from physical to biological sciences, from physics to chemistry, and all engineering disciplines. The materials and phenomena characterized by surface science range from se- conductors, where the impact of surface science has been critical to progress, to metals and ceramics, where selected contributions have been important, to bio- terials, where contributions are just beginning to impact the field, to textiles, where the impact has been marginal. With such a range of fields and applications, questions about sample selection, preparation, treatment, and handling are difficult to cover completely in one review article or one chapter. Therefore, the editors of this book have assembled a range of experts with experience in the major fields impacted by surface characterization. It is the only book which treats the subject of sample handling, preparation, and treatment for surface characterization. It is full of tricks, cautions, and handy tips to make the laboratory scientist's life easier. With respect to organization of the book, the topics range from discussion of vacuum to discussion of biological, organic, elemental or compound samples, to samples prepared ex situ or in situ to the vacuum, to deposition ofthin films. Generic considerations of sample preparation are also given.

This book presents recent results of basic research in the field of Raman scattering by optic and acoustic phonons in semiconductors, quantum wells and superlattices. It also describes various new applications for analytical materials research which have emerged alongside with scientific progress. Trends in Raman techniques and instrumentation and their implications for future developments are illustrated.

Present-day scienceand technology have become increasingly based on studies and applications of thin films. This is especiallytrue of solid-state physics, semiconduc tor electronics, integrated optics, computer science, and the like. In these fields, it is necessary to use filmswith an ordered structure, especiallysingle-crystallinefilms, because physical phenomena and effects in such films are most reproducible. Also, active parts of semiconductor and other devices and circuits are created, as a rule, in single-crystal bodies. To date, single-crystallinefilms have been mainly epitaxial (or heteroepitaxial); i.e., they have been grown on a single-crystalline substrate, and principal trends, e.g., in the evolution of integrated circuits (lCs), have been based on continuing reduction in feature size and increase in the number of components per chip. However, as the size decreases into the submicrometer range, technological and physical limitations in integrated electronics become more and more severe. It is generally believed that a feature size of about 0.1um will have a crucial character. In other words, the present two-dimensional ICs are anticipated to reach their limit of minimization in the near future, and it is realized that further increase of packing density and/or functions might depend on three-dimensional integration. To solve the problem, techniques for preparation of single-crystalline films on arbitrary (including amorphous) substrates are essential."

Graphene is presented and analyzed as a replacement for silicon. The Primary focus is on solar cell and CMOS device technologies, with attention to the fabrication methods, including extensions needed, in each case. Specialized applications for graphene within the existing silicon technology are discussed and found to be promising.

The book presents information about Terahertz science, Terahertz photodetectors and Terahertz Lasers. A special emphasis is given to room temperature operation of long wavelength photodetectors based on novel quantum dots (Centered Defect Spherical Quantum Dots). Moreover, a complete analysis of systems based on Quantum Cascade structures to detect far infrared wavelengths is provided. Finally, the book presents Terahertz laser principles considering multi-color lasers in this range of wavelengths. Written as a background for graduate students in the Optics field.

Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented. The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process.

In 1987 a major breakthrough occurred in materials science. A new family of materials was discovered that became superconducting above the temperature at which nitrogen gas liquifies, namely, 77 K or -196 DegreesC. Within months of the discovery, a wide variety of experimental techniques were brought to bear in order to measure the properties of these materials and to gain an understanding of why they superconduct at such high temperatures. Among the techniques used were electromagnetic absorption in both the normal and the superconducting states. The measurements enabled the determination of a wide variety of properties, and in some instances led to the observation of new effects not seen by other measu- ments, such as the existence of weak-link microwave absorption at low dc magnetic fields. The number of different properties and the degree of detail that can be obtained from magnetic field- and temperature-dependent studies of electromagnetic abso- tion are not widely appreciated. For example, these measurements can provide information on the band gap, critical fields, the H-T irreversibility line, the amount of trapped flux, and even information about the symmetry of the wave function of the Cooper pairs. It is possible to use low dc magnetic field-induced absorption of microwaves with derivative detection to verify the presence of superconductivity in a matter of minutes, and the measurements are often more straightforward than others. For example, they do not require the physical contact with the sample that is necessary when using four-probe resistivity to detect superconductivity.

The International Symposium on Biological Effects of Magnetic and Electrom- netic Fields was held from September 3-4, 1993 at Kyushu University in Fukuoka . Japan . Originally, it was only intended to be an informal gathering of many scientists who had accepted my invitation to visit Kyushu University after the XXIVth General Assembly of the International Union of Radio Science (URSI), held in Kyoto prior to our symposium . However, since so many distinguished scientists were able to come, it was decided that a more formal symposium would be possible . It was a very productive symposium and, as a result, many of the guests consented that it would be a good idea to gather all the information put forth at the meeting and have it published. In addition, although they were unfortunately unable to attend the symposium . many other distinguished scientists had also expressed their wish to contribute to this effort and, in so doing. help to increase understanding in this, as yet, relatively immature field of science . The question of both positive and negative effects of magnetic and electromagnetic fields on biological systems has become more and more important in our world today as they .

The need for advanced thermal management materials in electronic packaging has been widely recognized as thermal challenges become barriers to the electronic industry's ability to provide continued improvements in device and system performance. With increased performance requirements for smaller, more capable, and more efficient electronic power devices, systems ranging from active electronically scanned radar arrays to web servers all require components that can dissipate heat efficiently. This requires that the materials have high capability of dissipating heat and maintaining compatibility with the die and electronic packaging. In response to critical needs, there have been revolutionary advances in thermal management materials and technologies for active and passive cooling that promise integrable and cost-effective thermal management solutions. This book meets the need for a comprehensive approach to advanced thermal management in electronic packaging, with coverage of the fundamentals of heat transfer, component design guidelines, materials selection and assessment, air, liquid, and thermoelectric cooling, characterization techniques and methodology, processing and manufacturing technology, balance between cost and performance, and application niches. The final chapter presents a roadmap and future perspective on developments in advanced thermal management materials for electronic packaging.

A major global issue that the world is facing today is the upcoming depletion of fossil fuels and the energy crisis. In 1998, the global annual energy consumption was 12. 7 TW; of which 80% was generated from fossil fuels. This also translates into huge annual emissions of CO that leads to massive environmental problems, 2 particularly the global warming, which could be disastrous. Future global annual energy needs are also estimated to rise dramatically. A major challenge confronting the world is to ?nd an additional 14-20 TW by 2050 when our energy reserves based on fossil fuels are vanishing. The massive demand for energy would require materials and/or processes that would help to provide new sources of clean ren- able energy or to develop processes that would harvest energy or to better utilize energy in an ef?cient manner. The present monograph, WOLEDs and Organic Photovoltaics - Recent Advances and Applications, focuses on a very important and timely subject of topical interest that deals with the more ef?cient use of energy through white organic light-emitting diodes (WOLEDs) for solid-state lighting and the development of clean sources of renewable energy through the harvesting of light energy for conversion into electrical energy in organic photovoltaics. While LED solid-state lighting and photovoltaics have been dominated by inorganic semiconductor materials and silicon-based solar cells, there have been growing interests in the development of WOLEDs and organic photovoltaics.