This book is concerned primarily with the fundamental theory underlying the physical and chemical properties of crystalIine semiconductors. After basic introductory material on chemical bonding, electronic band structure, phonons, and electronic transport, some emphasis is placed on surface and interfacial properties, as weil as effects of doping with a variety of impurities. Against this background, the use of such materials in device physics is examined and aspects of materials preparation are discussed briefty. The level of presentation is suitable for postgraduate students and research workers in solid-state physics and chemistry, materials science, and electrical and electronic engineering. Finally, it may be of interest to note that this book originated in a College organized at the International Centre for Theoretical Physics, Trieste, in Spring 1984. P. N. Butcher N. H. March M. P. Tosi vii Contents 1. Bonds and Bands in Semiconductors 1 E. Mooser 1. 1. Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1. 2. The Semiconducting Bond . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 1. 3. Bond Approach Versus Band Model. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 1. 4. Construction of the Localized X by Linear Combination of n Atomic Orbitals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 1. 5. The General Octet Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 1. 6. The Aufbau-Principle of the Crystal Structure of Semiconductors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 1. 7. A Building Principle for Polyanionic Structures . . . . . . . . . . . . . . . . . . . . . . 29 I. H. Structural Sorting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 1. 9. Chemical Bonds and Semiconductivity in Transition-Element Compounds . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46 1. 10. Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53 References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54 2. Electronic Band Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55 G. Grosso 2. 1. Two Different Strategies for Band-Structure Calculations . . . . . . . 55 2. 2. The Tight-Binding Method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

This book is an outgrowth of a course given by the author for people in industry, government, and universities wishing to understand the implica tions of emerging optical fiber technology, and how this technology can be applied to their specific information transport and sensing system needs. The course, in turn, is an outgrowth of 15 exciting years during which the author participated in the research and development, as well as in the application, of fiber technology. The aim of this book is to provide the reader with a working knowledge of the components and subsystems which make up fiber systems and of a wide variety of implemented and proposed applications for fiber technology. The book is directed primarily at those who would be users, as opposed to developers, of the technology. The first half of this book is an overview of components and subsys tems including fibers, connectors, cables, sources, detectors, receivers, transmitters, and miscellaneous components. The goal is to familiarize the reader with the properties of these components and subsystems to the extent necessary to understand their potential applications and limitations.

The Institute for Amorphous Studies was founded in 1982 as the international center for the investigation of amorphous mate rials. It has since played an important role in promoting the und er standing of disordered matter in general. An Institute lecture series on "Fundamentals of Amorphous Materials and Devices" was held during 1982-83 with distinguished speakers from universities and industry. These events were free and open to the public, and were attended by many representatives of the scientific community. The lectures themselves were highly successful inasmuch as they provided not only formal instruction but also an opportunity for vigorous and stimulating debate. That last element could not be captured within the pages of a book I but the lectures concentrated on the latest advances in the field I which is why their essential contents are he re reproduced in collective form. Together they constitute an interdisciplinary status report of the field. The speakers brought many different viewpoints and a variety of back ground experiences io bear on the problems involved I but though language and conventions vary I the essential unity of the concerns is very clear I as indeed are the ultimate benefits of the many-sided approach."

GaAs devices and integrated circuits have emerged as leading contenders for ultra-high-speed applications. This book is intended to be a reference for a rapidly growing GaAs community of researchers and graduate students. It was written over several years and parts of it were used for courses on GaAs devices and integrated circuits and on heterojunction GaAs devices developed and taught at the University of Minnesota. Many people helped me in writing this book. I would like to express my deep gratitude to Professor Lester Eastman of Cornell University, whose ideas and thoughts inspired me and helped to determine the direction of my research work for many years. I also benefited from numerous discussions with his students and associates and from the very atmosphere of the pursuit of excellence which exists in his group. I would like to thank my former and present co-workers and colleagues-Drs. Levinstein and Gelmont of the A. F. Ioffe Institute of Physics and Technology, Professor Melvin Shaw of Wayne State University, Dr. Kastalsky of Bell Communi cations, Professor Gary Robinson of Colorado State University, Professor Tony Valois, and Dr. Tim Drummond of Sandia Labs-for their contributions to our joint research and for valuable discussions. My special thanks to Professor Morko.;, for his help, his ideas, and the example set by his pioneering work. Since 1978 I have been working with engineers from Honeywell, Inc.-Drs."

of progress has been made in the development of In the last twenty years a great amount new magnetic materials. Permanent magnets have progressed from the AlNiCo's (with (BH)m-8 MGOe) to the strong rare-earth magnets of SmCo BH)m-20 MGOe), Sm2(Co, Fe, Cu, Zrh7 s BH)m-30 MGOe) and the recently discovered Nd-Fe-B super-magnets with (BH)m-50 MGOe. For years the magnetic storage industry has employed Fe0 and CrO for storage media and 2 3 z permalloys and ferrites for recording heads. The recent development of thin film heads, the demand of higher density of information storage and the emergence of completely new technologies, like magneto-optics, call for entirely new types of magnetic materials. Another area in which new techniques of materials preparation have made a dramatic impact is the epitaxial growth of magnetic films. Recent work has shown that this process can be controlled on the scale of atomic monolayers permitting the growth of totally artificial structures, such as artificial superlattices with a resolution on this scale. Epitaxial growth has also permitted the stabilization of metastable phases in thin film form. These new phases often possess striking properties, such as strong perpendicular anisotropies, which may prove useful for technological applications such as recording. Research on magnetic multilayers and superlattices is increasing at an accelerating pace. Complex couplings between different magnetic layers lead to new properties not seen in bulk materials.

This volume contains a sequence of reviews presented at the NATO Advanced Study Institute on 'Low Dimensional Structures in Semiconductors ... from Basic Physics to Applications.' This was part of the International School of Materials Science and 1990 at the Ettore Majorana Centre in Sicily. Technology held in July Only a few years ago, Low Dimensional Structures was an esoteric concept, but now it is apparent they are likely to playa major role in the next generation of electronic devices. The theme of the School acknowledged this rapidly developing maturity.' The contributions to the volume consider not only the essential physics, but take a wider view of the topic, starting from material growth and processing, then prog ressing right through to applications with some discussion of the likely use of low dimensional devices in systems. The papers are arranged into four sections, the first of which deals with basic con cepts of semiconductor and low dimensional systems. The second section is on growth and fabrication, reviewing MBE and MOVPE methods and discussing the achievements and limitations of techniques to reduce structures into the realms of one and zero dimensions. The third section covers the crucial issue of interfaces while the final section deals with devices and device physics."

The aim of this NATO Advanced Study Institute was to bring together scientists and students working in the field of laser matter interactions in order to review and stimulate developmentoffundamental science with ultra-short pulse lasers. New techniques of pulse compression and colliding-pulse mode-locking have made possible the construction of lasers with pulse lengths in the femtosecond range. Such lasers are now in operation at several research laboratories in Europe and the United States. These laser facilities present a new and exciting research direction with both pure and applied science components. In this ASI the emphasis is on fundamental processes occurring in the interaction of short laser pulses with atoms, molecules, solids, and plasmas. In the case of laser-atom (molecule) interactions, high power lasers provide the first access to extreme high-intensity conditions above 10'8 Watts/em', a new frontier for nonlinear interaction of photons with atoms and molecules. New phenomena observed include multiphoton ionization processes, atomic collisions in the presence of a strong laser field, Coulomb explosion following rapid ionization of a molecule and the production of high harmonics of the laser source. Another important topic reviewed in this ASI is the lasercooling ofatoms.

This volume contains the papers presented at the NATO Advanced Research Workshop on "Magnetism and Structure in Systems of Reduced Dimension," held at l'Institut d'Etudes Scientifiques de Cargese - U.M.S. - C.N.R.S. - Universite de Corte Universite de Nice Sophia - Antipolis during June 15-19, 1992. The ordering of papers in the volume reflects the sequence of papers presented at the workshop. The aim was not to segregate the papers into rigidly defmed areas but to group the papers into small clusters, each cluster having a common theme. In this way the parallel, rather than serial, development of areas such as preparation of films, magnetic and structural characterization was highlighted. Indeed the success of the field depends on such parallel development and is assisted by workshops of this nature and the international collaborations which they foster. The organizers and participants of the NATO workshop express their thanks to Mme. Marie-France Hanseier and the staff at l'Institut d'Etudes Scientifiques de Cargese U.M.S. - C.N.R.S. - Universite de Corte - Universite de Nice Sophia - Antipolis for making the workshop and local arrangements a memorable success. Warm thanks are also expressed to Varadachari Sadagopan and Pascal Stefanou for their encouragement and help in making the workshop a reality. We are also grateful to Kristl Hathaway, Larry Cooper and Gary Prinz for advice in developing the workshop program."

Glasses containing metallic nanoparticles exhibit very promising linear and nonlinear optical properties, mainly due to the surface plasmon resonances (SPRs) of the nanoparticles. The spectral position in the visible and near-infrared range and polarization dependence of the SPR arecharacteristically determined by the nanoparticles shapes.

The focus of "Ultra-Short Pulsed Laser Engineered Metal-Glass Nanocomposites" is the interaction of intense ultra-short laser pulses with glass containing silver nanoparticles embedded in soda-lime glass, and nanostructural modifications in metal-glass nanocomposites induced by such laser pulses. In order to provide a comprehensive physical picture of the processes leading to laser-induced persistent shape transformation of the nanoparticles, series of experimental results investigating the dependences of laser assisted shape modifications of nanoparticles with laser pulse intensity, excitation wavelength, temperature are considered. In addition, the resulting local optical dichroism allows producing very flexibly polarizing optical (sub-) microstructures with well-specified optical properties. The achieved considerable progress towards technological application of this technique, in particular also for long-term optical data storage, is also discussed.

This Advanced Study Institute on the topic of SOLID STATE MICROBATTERIES is the third and final institute on the general theme of a field of study now termed "SOLID STATE IONICS". The institute was held in Erice, Sicily, Italy, 3 - 15 July 1988. The objective was to assemble in one location individuals from industry and academia expert in the fields of microelectronics and solid state ionics to determine the feasibility of merging a solid state microbattery with microelectronic memory. Solid electrolytes are in principle amenable to vapor deposition, RF or DC sputtering, and other techniques used to fabricate microelectronic components. A solid state microbattery 1 1 mated on the same chip carrier as the chip can provide on board memory backup power. A solid state microbattery assembled from properly selected anode/solid electrolyte/cathode materials could have environmental endurance properties equal or superior to semiconductor memory chips. Lectures covering microelectronics, present state-of-art solid state batteries, new solid electrolyte cathode materials, theoretical and practical techniques for fabrication of new solid electrolytes, and analytical techniques for study of solid electrolytes were covered. Several areas where effort is required for further understanding of materials in pure form and their interactions with other materials at interfacial contact points were identified. Cathode materials for solid state batteries is one particular research area which requires attention. Another is a microscopic model of conduction in vitreous solid electrolytes to enhance the thermodynamic macroscopic Weak ~lectrolyte Iheory (WET).

One area of science that has shown an explosive growth over the last few decades is materials science. Inherently by nature products of both basic and applied research, materials make possible life and society as we know it today. Materials, ranging from ceramics to semiconductors to composites, are such that new ones must not only be designed and made ... they must also be characterized in terms of their physical, chemical, and mechanical properties. Thus, many new state of-the-art techniques involving spectroscopy, microscopy, and other approaches are now routinely used. Modem materials have wide applications in many sectors of technology. Films, for example, constitute an enormous area of materials and are used extensively. Films in tum can be integrated with other systems such as superconducting metal oxides and organic superconductors. Additionally, ceramics can also be synthesized and fabricated as films for different applications. Catalysts, too, can vary widely in both composition and form. The number of applications for catalysts in industry must easily rank as one of the highest number of applications for any class of materials. Catalysis is impOltant for a wide range of activities in industry, from petroleum refining to the synthesis of a large number of industrial feedstock materials. Researchers in this area of materials are constantly trying to unravel new approaches to making better catalysts."

Ion beams have been used for decades for characterizing and analyzing materials. Now energetic ion beams are providing ways to modify the materials in unprecedented ways. This book highlights the emergence of high-energy swift heavy ions as a tool for tailoring the properties of materials with nanoscale structures. Swift heavy ions interact with materials by exciting/ionizing electrons without directly moving the atoms. This opens a new horizon towards the 'so-called' soft engineering. The book discusses the ion beam technology emerging from the non-equilibrium conditions and emphasizes the power of controlled irradiation to tailor the properties of various types of materials for specific needs.

This book brings together selected contributions both on the fundamental information on the physics and chemistry of these materials, new physical ideas and decisive experiments. It constitutes both an insightful treatise and a handy reference for specialists and graduate students working in solid state physics and chemistry, material science and related fields.

This book has been written as part of a series of scientific books being published by Plenum Press. The scope of the series is to review a chosen topic in each volume. To supplement this information, the abstracts to the most important references cited in the text are reprinted, thus allowing the reader to find in-depth material without having to refer to many additional publications. This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing. Although a number of books have appeared dealing with this area of physics and chemistry, these all deal with parts of the field. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI. Examples are given throughout the fundamental sections, in order to give the reader a better insight in the meaning and magnitude of the many parameters relevant to dry etching. Electrical engineering concepts are emphasized to explain the pros and cons of reactor concepts and excitation frequency ranges. In the description of practical applications, extensive use is made of cross-referencing between processes and materials, as well as theory and practice. It is thus intended to provide a total model for understanding dry etching. The book has been written such that no previous knowledge of the subject is required. It is intended as a review of all aspects of dry etching for silicon semiconductor processing.

"You, 0 Sun, are the eye of the world You are the soul of all embodied beings You are the source of all creatures You are the discipline of all engaged in work" - Translated from Mahabharata 3rd Century BC Today, energy is the lifeline and status symbol of "civilized" societies. All nations have therefore embarked upon Research and Development pro grams of varying magnitudes to explore and effectively utilize renewable sources of energy. Albeit a low-grade energy with large temporal and spatial variations, solar energy is abundant, cheap, clean, and renewable, and thus presents a very attractive alternative source. The direct conver sion of solar energy to electricity (photovoltaic effect) via devices called solar cells has already become an established frontier area of science and technology. Born out of necessity for remote area applications, the first commercially manufactured solar cells - single-crystal silicon and thin film CdS/Cu2S - were available well over 20 years ago. Indeed, all space vehicles today are powered by silicon solar cells. But large-scale terrestrial applications of solar cells still await major breakthroughs in terms of discovering new and radical concepts in solar cell device structures, utilizing relatively more abundant, cheap, and even exotic materials, and inventing simpler and less energy intensive fabrication processes. No doubt, this extraordinary challenge in R/D has led to a virtual explosion of activities in the field of photovoltaics in the last several years."

The properties of Si02 and the Si-Si02 interface provide the key foundation onto which the majority of semiconductor device technology has been built Their study has consumed countless hours of many hundreds of investigators over the years, not only in the field of semiconductor devices but also in ceramics, materials science, metallurgy, geology, and mineralogy, to name a few. These groups seldom have contact with each other even though they often investigate quite similar aspects of the Si02 system. Desiring to facilitate an interaction between these groups we set out to organize a symposium on the Physics and Chemistry of Si()z and the Si-Si()z Interface under the auspices of The Electrochemical Society, which represents a number of the appropriate groups. This symposium was held at the 173rd Meeting of The Electrochemical Society in Atlanta, Georgia, May 15-20, 1988. These dates nearly coincided with the ten year anniversary of the "International Topical Conference on the Physics of Si02 and its Interfaces" held at mM in 1978. We have modeled the present symposium after the 1978 conference as well as its follow on at North Carolina State in 1980. Of course, much progress has been made in that ten years and the symposium has given us the opportunity to take a multidisciplinary look at that progress.

The seventh Advanced Study Institute (ASI) on Techniques and Concepts of High Energy Physics was held for the second time at the Club St. Croix, in St. Croix, U.S. Virgin Islands. The ASI brought together a total of 75 participants, from 19 countries. The primary support for the meeting was again provided by the Scientific Affairs Division of NATO. The ASI was cosponsored by the U.S. Department of Energy, by Fermilab, by the National Science Foundation, and by the University of Rochester. A special contribution from the Oliver S. and Jennie R. Donaldson Charitable Trust provided an important degree of flexibility, as well as support for worthy students from developing countries. As in the case of the previous ASIs, the scientific program was designed for advanced graduate students and recent PhD recipients in experimental particle physics. The present volume of lectures should complement the material published in the first six ASIs, and prove to be of value to a wider audience of physicists.

The field of solid state ionics is multidisciplinary in nature. Chemists, physicists, electrochimists, and engineers all are involved in the research and development of materials, techniques, and theoretical approaches. This science is one of the great triumphs of the second part of the 20th century. For nearly a century, development of materials for solid-state ionic technology has been restricted. During the last two decades there have been remarkable advances: more materials were discovered, modem technologies were used for characterization and optimization of ionic conduction in solids, trial and error approaches were deserted for defined predictions. During the same period fundamental theories for ion conduction in solids appeared. The large explosion of solid-state ionic material science may be considered to be due to two other influences. The first aspect is related to economy and connected with energy production, storage, and utilization. There are basic problems in industrialized countries from the economical, environmental, political, and technological points of view. The possibility of storing a large amount of utilizable energy in a comparatively small volume would make a number of non-conventional intermittent energy sources of practical convenience and cost. The second aspect is related to huge increase in international relationships between researchers and exchanges of results make considerable progress between scientists; one find many institutes joined in common search programs such as the material science networks organized by EEC in the European countries.

Recently a new sphere in materials science* has formed which subject is structure and properties of electret materials used in engineering, medicine, biotechnology and other branches. It is characterized by specific methods of experimental investigations based on recording charge transfer, polarization and depolarization of dielectrics and involves original techniques and physico-mathematical aids where notions that exist at the interface of several natural and technical sciences are concentrated. It embraces a vast area of applications mainly in engineering, instrument making, electronics, medical technique, biotechnology, and etc., has a specialized technological base for electric polarization of dielectrics composed of uncommon technological methods, equipment and instrumentation. Apparently, future fundamental investigations in the domain of electret materials science are to be developed at the interface of computer of dielectrics. Elaboration of a simulation, physics and physical chemistry model for electric polarization of solid media with uneven charge density distribution, complicated by surface phenomena, outer electromagnetic, heat, chemical and other effects, presents a grave methodological problem. The simulation of structures in which polarization follows diffusion mechanism of chemically active molecules or their fragments, and the development of calculation methods for polarized charge relaxation and regularities of dielectric nonlinear properties, are the most urgent objectives of current research. Success in bioelectret effect studies is anticipated to result in profound widening of natural science knowledge.

The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need."

This book is the product of Research Study Group (RSG) 13 on "Human Engineering Evaluation on the Use of Colour in Electronic Displays," of Panel 8, "Defence Applications of Human and Biomedical Sciences," of the NATO Defence Research Group. RSG 13 was chaired by Heino Widdel (Germany) and consisted of Jeffrey Grossman (United States), Jean-Pierre Menu (France), Giampaolo Noja (Italy, point of contact), David Post (United States), and Jan Walraven (Netherlands). Initially, Christopher Gibson (United Kingdom) and Sharon McFaddon (Canada) participated also. Most of these representatives served previously on the NATO program committee that produced Proceedings of a Workshop on Colour Coded vs. Monochrome Displays (edited by Christopher Gibson and published by the Royal Aircraft Establishment, Farnborough, England) in 1984. RSG 13 can be regarded as a descendent of that program committee. RSG 13 was formed in 1987 for the purpose of developing and distributing guidance regarding the use of color on electronic displays. During our first meeting, we discussed the fact that, although there is a tremendous amount of information available concerning color vision, color perception, colorimetry, and color displays-much of it relevant to display design-it is scattered across numerous texts, journals, conference proceedings, and technical reports. We decided that we could fulfill the RSG's purpose best by producing a book that consolidates and summarizes this information, emphasizing those aspects that are most applicable to display design.

Amorphous Silicon/Crystalline Silicon Solar Cells deals with some typical properties of heterojunction solar cells, such as their history, the properties and the challenges of the cells, some important measurement tools, some simulation programs and a brief survey of the state of the art, aiming to provide an initial framework in this field and serve as a ready reference for all those interested in the subject. This book helps to "fill in the blanks" on heterojunction solar cells. Readers will receive a comprehensive overview of the principles, structures, processing techniques and the current developmental states of the devices. Prof. Dr. Wolfgang R. Fahrner is a professor at the University of Hagen, Germany and Nanchang University, China.

This book is the second in a series of scientific textbooks designed to cover advances in selected research fields from a basic and general viewpoint, so that only limited knowledge is required to understand the significance of recent developments. Further assistance for the non-specialist is provided by the summary of abstracts in Part 2, which includes many of the major papers published in the research field. Crystal Growth of Semiconductor Materials has been the subject of numerous books and reviews and the fundamental principles are now well-established. We are concerned chiefly with the deposition of atoms onto a suitable surface - crystal growth - and the generation of faults in the atomic structure during growth and subsequent cooling to room temperature - crystal defect structure. In this book I have attempted to show that whilst the fundamentals of these processes are relatively simple, the complexities of the interactions involved and the individuality of different materials systems and growth processes have ensured that experimentally verifiable predictions from scientific principles have met with only limited success - good crystal growth remains an art. However, recent advances, which include the reduction of growth temperatures, the reduction or elimination of reactant transport variables and the use of better-controlled energy sources to promote specific reactions, are leading to simplified growth systems.

An up-to-date view of the various detector/emitter materials systems currently in use or being actively researched. The book is aimed at newcomers and those already working in the IR industry. It provides both an introductory text and a valuable overview of the entire field.

The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of 'good design' in the abstract, the book is organized around a set of Case Studies that are based on real products, or, where appropriately well-documented products could not be found, on thoroughly published prototype work. The Case Studies were selected to sample a multidimensional space: different manufacturing and fabrication methods, different device applications, and different physical effects used for transduction. The Case Study subjects are: the design and packaging of a piezoresistive pressure sensor, a capacitively-sensed accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two electrostatically-actuated optical projection displays, two microsystems for the amplification of DNA, and a catalytic sensor for combustible gases.This book is used for a graduate course in 'Design and Fabrication of Microelectromechanical Devices (MEMS)' at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and will be a useful reference for the active MEMS professional. Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.