Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for MEMS above-aluminum-backend CMOS integration has already been demonstrated. However, aggressive interconnect scaling has led to the replacement of the traditional aluminum metallization by copper (Cu) metallization, due to its lower resistivity and improved reliability. Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 m Cu-backend CMOS. Furthermore, this book presents the first detailed investigation on the influence of deposition conditions, germanium content and doping concentration on the electrical and piezoresistive properties of boron-doped poly-SiGe. The development of a CMOS-compatible process flow, with special attention to the sealing method, is also described. Piezoresistive pressure sensors with different areas and piezoresistor designs were fabricated and tested. Together with the piezoresistive pressure sensors, also functional capacitive pressure sensors were successfully fabricated on the same wafer, proving the versatility of poly-SiGe for MEMS sensor applications. Finally, a detailed analysis of the MEMS processing impact on the underlying CMOS circuit is also presented.

This book presents a systemic view of nanophenomena in terms of disordered condensed media with characteristics arising at various hierarchical levels from nanoagents/nanoparticles through multiple technological interfaces to the creation of micro- or mesostructures with essential nanodimensional effects. These properties can be seen in various schemes for the functionalization of nanocarbon systems, namely, CNTs, GNRs, GNFs, carbon-based nanoaerogels, nanofoams, and so on, where nonregularities characterize surface nanointeractions and various nanointerconnects, resulting in both predictable and unpredictable effects. Beginning with nanosensing and finishing with other forms of functionalized nanomaterials, these effects will define the prospective qualities of future consumer nanoproducts and nanodevices. This book covers all aspects of nonregular nanosystems arising from the fundamental properties of disordered nanosized media, from electronic structure, surface nanophysics, and allotropic forms of carbon such as graphene and fullerenes including defect characterization, to spintronics and 3D device principles. Nonregular Nanosystems will be of interest to students and specialists in various fields of nanotechnology and nanoscience, experts on surface nanophysics and nanochemistry, as well as managers dealing with marketing of nanoproducts and consumer behavior research.

These are the Proceedings of the 6th International Symposium on Multibody Systems and Mechatronics (MUSME 2017) which was held in Florianopolis, Brazil, October 24-28, 2017. Topics addressed include analysis and synthesis of mechanisms; dynamics of multibody systems; design algorithms for mechatronic systems; simulation procedures and results; prototypes and their performance; robots and micromachines; experimental validations; theory of mechatronic simulation; mechatronic systems; and control of mechatronic systems. The MUSME 2017 Symposium was one of the activities of the FEIbIM Commission for Mechatronics and IFToMM technical Committees for Multibody Dynamics, Robotics and Mechatronics.

This book provides a comprehensive overview of the fascinating recent developments in atomic- and nanoscale magnetism, including the physics of individual magnetic adatoms and single spins, the synthesis of molecular magnets for spintronic applications, and the magnetic properties of small clusters as well as non-collinear spin textures, such as spin spirals and magnetic skyrmions in ultrathin films and nanostructures. Starting from the level of atomic-scale magnetic interactions, the book addresses the emergence of many-body states in quantum magnetism and complex spin states resulting from the competition of such interactions, both experimentally and theoretically. It also introduces novel microscopic and spectroscopic techniques to reveal the exciting physics of magnetic adatom arrays and nanostructures at ultimate spatial and temporal resolution and demonstrates their applications using various insightful examples. The book is intended for researchers and graduate students interested in recent developments of one of the most fascinating fields of condensed matter physics.

This book presents the latest achievements in the theory and practice of SEMS Group interaction by scientists from the Russian Academy of Sciences. It also discusses the development of methods for the design and simulation of SEMS Group interaction based on the principles of safety, flexibility and adaptability in behavior and intelligence and parallelism in information processing, computation and control. Recently, the task has been to ensure the functioning of robots within the framework of collective collaboration, so that they function efficiently, reliably and safely in real time. The topics covered include, but are not limited to, the following: - the planning behavior of the SEMS group;- methods and principles of designing of automatic control systems;- mathematical and computer modeling group interaction;- safety, flexibility and adaptability of the SEMS Group;- information-measuring soft- and hardware. This book is intended for students, scientists and engineers specializing in the field of smart electromechanical systems and robotics.

This book covers the theory, modeling, and implementation of different RF energy harvesting systems. RF energy harvesting is the best choice among the existing renewable energy sources, in terms of availability, cost, size, and integration with other systems. The device used for harvesting RF energy is called rectenna. A rectenna can work at the microwave, millimeter-wave, and terahertz waves. It also has the capability to operate at optical frequencies to be used for 6G and beyond communication systems. This book covers all aspects of wireless power transfer (WPT)/wireless energy harvesting (WEH), basics, theoretical concepts, and advanced developments occurring in the field of energy harvesting. It also covers the design theory for different types of antenna, rectifier, and impedance matching circuits used in RF energy harvesting systems. Different future and present applications, such as charging of vehicles, smart medical health care, self-driven e-vehicles, self-sustainable home automation system, and wireless drones, have also been discussed in detail.

This book, now in its second edition, introduces readers to quantum rings as a special class of modern high-tech material structures at the nanoscale. It deals, in particular, with their formation by means of molecular beam epitaxy and droplet epitaxy of semiconductors, and their topology-driven electronic, optical and magnetic properties. A highly complex theoretical model is developed to adequately represent the specific features of quantum rings. The results presented here are intended to facilitate the development of low-cost high-performance electronic, spintronic, optoelectronic and information processing devices based on quantum rings. This second edition includes both new and significantly revised chapters. It provides extensive information on recent advances in the physics of quantum rings related to the spin-orbit interaction and spin dynamics (spin interference in Rashba rings, tunable exciton topology on type II InAs/GaAsSb quantum nanostructures), the electron-phonon interaction in ring-like structures, quantum interference manifestations in novel materials (graphene nanoribbons, MoS2), and the effects of electrical field and THz radiation on the optical properties of quantum rings. The new edition also shares insights into the properties of various novel architectures, including coupled quantum ring-quantum dot chains and concentric quantum rings, topologic states of light in self-assembled ring-like cavities, and optical and plasmon m.odes in Moebius-shaped resonators.

This book presents a comprehensive review of particle image velocimetry (PIV) and particle tracking velocimetry (PTV) as tools for experimental fluid dynamics (EFD). It shares practical techniques for high-speed photography to accurately analyze multi-phase flows; in particular, it addresses the practical know-how involved in high-speed photography, including e.g. the proper setup for lights and illumination; optical systems to remove perspective distortion; and the density of tracer particles and their fluorescence in the context of PIV and PTV. In this regard, using the correct photographic technique plays a key role in the accurate analysis of the respective flow. Practical applications include bubble and liquid flow dynamics in materials processes agitated by gas injection at high temperatures, mixing phenomena due to jet-induced rotary sloshing, and wettability effects on the efficiency of the processes.

This book covers all the steps in order to fabricate a lab-on-a-chip device starting from the idea, the design, simulation, fabrication and final evaluation. Additionally, it includes basic theory on microfluidics essential to understand how fluids behave at such reduced scale. Examples of successful histories of lab-on-a-chip systems that made an impact in fields like biomedicine and life sciences are also provided. This book also: * Provides readers with a unique approach and toolset for lab-on-a-chip development in terms of materials, fabrication techniques, and components * Discusses novel materials and techniques, such as paper-based devices and synthesis of chemical compounds on-chip * Covers the four key aspects of development: basic theory, design, fabrication, and testing * Provides readers with a comprehensive list of the most important journals, blogs, forums, and conferences where microfluidics and lab-on-a-chip news, methods, techniques and challenges are presented and discussed, as well as a list of companies providing design and simulation support, components, and/or developing lab-on-a-chip and microfluidic devices.

This book presents original findings on tunable microwave metamaterial structures, and describes the theoretical and practical issues involved in the design of metamaterial devices. Special emphasis is given to tunable elements and their advantages in terms of feeding network simplification. Different biasing schemes and feeding network topologies are presented, together with extensive prototype measurements and simulations. The book describes a novel, unique solution for beam steering and beam forming applications, and thus paves the way for the diffusion of new agile communication system components. At the same time, it provides readers with an outstanding and timely review of wave propagation in periodic structures, tunability of metamaterials and the technological constraints that need to be considered in the design of reconfigurable microwave components.

This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.

Mechatronics, as the integrating framework of mechanical engineering, electrical engineering, computer technology, control engineering and automation forms a crucial part in the design, manufacture and maintenance of a wide range of engineering products and processes. The mechatronics itself changes rapidly in last decade, from original mixture of subfields into original approach in engineering as a technical discipline. The book you are holding is aimed to help the reader to orient in this evolving field of science and technology.

"Mechatronics 2013: Recent Technological and Scientific Advances" is the fourth volume following the previous editions in 2007, 2009 and 2011, providing the comprehensive and accessible coverage of advances in mechatronics presented on the 10th International Conference Mechatronics 2013, hosted this year at the Brno University of Technology, Czech Republic.

The contributions, that passed the thorough review process, give an insight into current trends in research and development among Mechatronics 2013 contributing countries, with paper topics covering design and modeling of mechatronic systems, control and automation, signal processing, robotics and others, keeping in mind the innovation benefits of mechatronics design approach, leading to the development, production and daily use of machines and devices possessing a certain degree of computer based intelligence.

The development of nanomaterials opens the possibility for new materials with outstanding properties compared to classical engineering materials. These materials can find applications in different fields such as medical treatment or structural mechanics.

This monograph focuses on two major groups of nanomaterials, i.e.nanoparticels and nanocomposites. Nanopartices, for example in the form of hollow particles, allow for new possibilities in drug delivery. Different aspects of nanoparticles ranging from manufacturing to modeling and simulation are covered. Nanocomposite materials are formed by mixing two or more dissimilar materials at the nanoscale in order to control and develop new and improved structures and properties. The properties of nanocomposites depend not only on the individual components used but also on the morphology and the interfacial characteristics. Nanocomposite coatings and materials are one of the most exciting and fastest growing areas of research and novel properties being continuously developed which are previously unknown in the constituent materials. Thus, the second part of this monograph gives an overview on the latest developments in the area of composites and coatings based on nanomaterials."

The thesis covers a broad range of electronic, optical and opto-electronic devices and various predicted physical effects. In particular, it examines the quantum interference transistor effect in graphene nanorings; tunable spin-filtering and spin-dependent negative differential resistance in composite heterostructures based on graphene and ferromagnetic materials; optical and novel electro-optical bistability and hysteresis in compound systems and the real-time control of radiation patterns of optical nanoantennas. The direction of the main radiation lobe of a regular plasmonic array can be changed abruptly by small variations in external control parameters. This optical effect, apart from its relevance for applications, is a revealing example of the Umklapp process and, thus, is a visual manifestation of one of the most fundamental laws of solid state physics: the conservation of the quasi-momentum to within a reciprocal lattice vector. The thesis analyzes not only results for particular device designs but also a variety of advanced numerical methods which are extended by the author and described in detail. These methods can be used as a sound starting point for further research.

This volume gathers the latest advances, innovations and applications in the field of cable robots, as presented by leading international researchers and engineers at the 4th International Conference on Cable-Driven Parallel Robots (CableCon 2019), held in Krakow, Poland on June 30-July 4, 2019, as part of the 5th IFToMM World Congress. It covers the theory and applications of cable-driven parallel robots, including their classification, kinematics and singularity analysis, workspace, statics and dynamics, cable modeling and technologies, control and calibration, design methodologies, hardware development, experimental evaluation and prototypes, as well as application reports and new application concepts. The contributions, which were selected through a rigorous international peer-review process, share exciting ideas that will spur novel research directions and foster new multidisciplinary collaborations.

This book demonstrates how to use the Synopsys Sentaurus TCAD 2014 version for the design and simulation of 3D CMOS (complementary metal-oxide-semiconductor) semiconductor nanoelectronic devices, while also providing selected source codes (Technology Computer-Aided Design, TCAD). Instead of the built-in examples of Sentaurus TCAD 2014, the practical cases presented here, based on years of teaching and research experience, are used to interpret and analyze simulation results of the physical and electrical properties of designed 3D CMOSFET (metal-oxide-semiconductor field-effect transistor) nanoelectronic devices. The book also addresses in detail the fundamental theory of advanced semiconductor device design for the further simulation and analysis of electric and physical properties of semiconductor devices. The design and simulation technologies for nano-semiconductor devices explored here are more practical in nature and representative of the semiconductor industry, and as such can promote the development of pioneering semiconductor devices, semiconductor device physics, and more practically-oriented approaches to teaching and learning semiconductor engineering. The book can be used for graduate and senior undergraduate students alike, while also offering a reference guide for engineers and experts in the semiconductor industry. Readers are expected to have some preliminary knowledge of the field.

This book covers the state of the art of laser micro- and nanotechnology. The physical fundamentals of different processes and the application are presented. The book deals with different materials like phase change and memory alloys, thin films, polymers etc. New phenomena and mechanisms of laser-matter interaction in nano-domains are explained. This book is helpful for students, postgraduates, engineers and researches working not only in the field of laser microtechnology but also in high-tech industry, like photonics, microelectronics, information technology.

This book gives a comprehensive overview of electrochemical-based biosensors and their crucial components. Practical examples are given throughout the text to illustrate how the performance of electrochemical-based biosensors can be improved by nanoscale surface modification and how an optimal design can be achieved. All essential aspects of biosensors are considered, including electrode functionalization, efficiency of the mass transport of reactive species, and long term durability and functionality of the sensor. This book also: * Explains how the performance of an electrochemical-based biosensor can be improved by nanoscale surface modification * Gives readers the tools to evaluate and improve the performance of a biosensor with a multidisciplinary approach that considers electrical, electrostatic, electrochemical, chemical, and biochemical events * Links the performance of a sensor to the various governing physical and chemical principles so readers can fully understand how a biosensor with nanoscale modified electrode surface functions.

This book presents a new system of solar cells. Colloidal nanocrystals possess many physical and chemical properties which can be manipulated by advanced control over structural features like the particle size. One application field is photovoltaics where colloidal semiconductor nanocrystals are explored as components of photo-active layers which can be produced from liquid media, often in combination with conductive polymers. The further development of this interdisciplinary field of research requires a deep understanding of the physics and chemistry of colloidal nanocrystals, conducting polymers and photovoltaic devices. This book aims at bridging gaps between the involved scientific disciplines and presents important fundamentals and the current state of research of relevant materials and different types of nanoparticle-based solar cells. The book will be of interest to researchers and PhD students. Moreover, it may also serve to accompany specialized lectures in related areas.

This book shares the knowledge of active and prestigious worldwide researchers and scholars in the field of healthcare monitoring as authors investigate historical developments, summarize latest advancements, and envision future prospects on wearable, attachable, and invisible devices that monitor diverse physiological information. The coverage of the book spans multiple disciplines, from biomechanics, to bioelectricity, biochemistry, biophysics and biomaterials. There is also wide coverage of various physical and chemical quantities such as electricity, pressure, flow, motion, force, temperature, gases, and biomarkers. Each chapter explores the background of a specific monitoring device, as well as its physical and chemical principles and instrumentation, signal processing and data analysis, achieved outcomes and application scenarios, and future research topics. There are chapters on: Electrocardiograms, electroencephalograms, and electromyograms Measurement of flow phenomenon Latest wearable technologies for the quantification of human motion Various forms of wearable thermometers Monitoring of gases and chemical substances produced during metabolism...and more! This book is appropriate and accessible for students and scientists, as well as researchers in biomedical engineering, computer engineers, healthcare entrepreneurs, administrative officers, policy makers, market vendors, and healthcare personnel. It helps to provide us with insights into future endeavors, formulate innovative businesses and services, and will help improve people's health and quality of life.

This book covers the physical properties of nanosized ferroics, also called nanoferroics. Nanoferroics are an important class of ceramic materials that substitute conventional ceramic ferroics in modern electronic devices. They include ferroelectric, ferroelastic, magnetic and multiferroic nanostructured materials. The phase transitions and properties of these nanostructured ferroics are strongly affected by the geometric confinement originating from surfaces and interfaces. As a consequence, these materials exhibit a behavior different from the corresponding bulk crystalline, ceramic and powder ferroics. This monograph offers comprehensive coverage of size- and shape-dependent effects at the nanoscale; the specific properties that these materials have been shown to exhibit; the theoretical approaches that have been successful in describing the size-dependent effects observed experimentally; and the technological aspects of many chemical and physico-chemical nanofabrication methods relevant to making nanoferroic materials and composites. The book will be of interest to an audience of condensed matter physicists, material scientists and engineers, working on ferroic nanostructured materials, their fundamentals, fabrication and device applications.

This book provides a comprehensive overview of the photonic sensing field by covering plasmonics, photonic crystal, and SOI techniques from theory to real sensing applications. A literature review of ultra-sensitive photonic sensors, including their design and application in industry, makes this a self-contained and comprehensive resource for different types of sensors, with high value to the biosensor sector in particular. The book is organized into four parts: Part I covers the basic theory of wave propagation, basic principles of sensing, surface plasmon resonance, and silicon photonics; Part II details the computational modeling techniques for the analysis and prediction of photonic sensors; Part III and Part IV cover the various mechanisms and light matter interaction scenarios behind the design of photonic sensors including photonic crystal fiber sensors and SOI sensors. This book is appropriate for academics and researchers specializing in photonic sensors; graduate students in the early and intermediate stages working in the areas of photonics, sensors, biophysics, and biomedical engineering; and to biomedical, environmental, and chemical engineers.

The present volume is a collection of review articles highlighting the fundamental advances made in this area by the internationally acclaimed research groups , most of them being pioneers themselves and coming together for the first time.

Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors' groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques. Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China. Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.

This book describes the state of the art in the field of bioanalytical nano- and microsystems with optical functionality. In 12 chapters distinguished scientists and leaders in their respective fields show how various optical technologies have been miniaturized and integrated over the last few decades in order to be combined with nano- and microsystems for applications in the life sciences. The main detection and characterization technologies are introduced, and examples of the superiority of these integrated approaches compared to traditional ones are provided. Examples from e.g. the fields of optical waveguides, integrated interferometers, surface plasmon resonance or Raman spectroscopy are introduced and discussed, and it is shown how these approaches have led to novel functionalities and thereby novel applications.