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Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Industrial chemistry
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Plasma-Surface Interactions and Processing of Materials (Paperback, Softcover reprint of the original 1st ed. 1990)
Loot Price: R8,561
Discovery Miles 85 610
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Plasma-Surface Interactions and Processing of Materials (Paperback, Softcover reprint of the original 1st ed. 1990)
Series: NATO Science Series E:, 176
Expected to ship within 10 - 15 working days
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An understanding of the processes involved in the basic and applied
physics and chemistry of the interaction of plasmas with materials
is vital to the evolution of technologies such as those relevant to
microelectronics, fusion and space. The subjects dealt with in the
book include: the physics and chemistry of plasmas, plasma
diagnostics, physical sputtering and chemical etching, plasma
assisted deposition of thin films, ion and electron bombardment,
and plasma processing of inorganic and polymeric materials. The
book represents a concentration of a substantial amount of
knowledge acquired in this area - knowledge which was hitherto
widely scattered throughout the literature - and thus establishes a
baseline reference work for both established and tyro research
workers.
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