Electroweak Phase Transition and the Early Universe, a NATO Advanced Re- search Workshop, was held March 23-25, 1994, at the Hotel Tivoli in Sintra, Portugal. The meeting was co-sponsored by three other Lisbon-based institutions: the Fundac;ao Gulbenkian, J. N.!. C. T. (Junta Nacional para Investigac;ao Cientifica e Tecnologica) and G. T. A. E. (Grupo Teorico de Alta Energias). The workshop brought together a large number of theoretical physicists who are actively researching topics relevant to the understanding of the standard model of electroweak interactions in the early universe. We were pleased and overwhelmed by the positive, and sometimes instan- taneous response that our enterprise raised right from its inception. The old town of Sintra provided a serene and pleasant environment for the par- ticipants. Some heated and controversial discussions on many unanswered questions in the standard model took place throughout the three days of the workshop. If one consensus emerged from the meeting, it was the imperative need for non-perturbative techniques for the understanding of the electroweak phase transition.

The aim of the workshop was to bring together specialists in various fields where non-exponential relaxation is observed in order to compare models and experimental results and to examine the general physical principles governing this type of behaviour. Non-exponential relaxation is found in extremely diverse physical systems all of which can be classified as complex. The form of the relaxation is generally parametrized using logarithmic, algebraic or stretched exponential decay forms. The conceptually simplest mechanism for the non-exponential decay is a spectrum of relaxation rates due to non-interacting units each of which relaxes with a different intrinsic time constant. Clear experimental examples can be given where for instance the relaxation of a collection of isolated polymer molecules leads to an overall stretched exponential decay. Non-exponential relaxation is observed in all strongly interacting complex systems (structural glasses, spin glasses, etc ... ) where each elementary unit is in interaction with many other units.

A NATO Advanced Studies Institute was held June 12-23, 1978, at the University of Wisconsin in Madison, Wisconsin. It was a topical Institute in theoretical nuclear physics and had the some what novel feature of focussing not on a single topic but on two closely allied ones: pion-nucleus and heavy-ion physics. These two fields. both dedicated to the investigation of short-wave length properties of nuclei, have many techniques and concepts in cornmon, and essentially become one in the topic of relativistic heavy-ion physics. The purpose of including both in a single Institute was to encourage the practitioners in each of these fields to learn from those in the other; to judge from the liveli ness of the questioning which ensued, the purpose was well-served indeed. Because the Institute was viewed as one which served both educational and research ends, the lecturers took particular pains to develop their subjects in a careful, coherent sequence. The result is a compendium of advanced techniques and current results in these two rapidly-expanding fields of nuclear theory which should serve interested physicists as an ideal introduction to the fields. In addition to the support provided by the Scientific Affairs Division of NATO, substantial financial assistance was provided by the U. S. National Science Foundation and the Graduate School of the University of Wisconsin."

The motivations, goals and general culture of theoretical physics and mathematics are different. Most practitioners of either discipline have no necessity for most of the time to keep abreast of the latest developments in the other. However on occasion newly developed mathematical concepts become relevant in theoretical physics and the less rigorous theoretical physics framework may prove valuable in understanding and suggesting new theorems and approaches in pure mathematics. Such interdis ciplinary successes invariably cause much rejoicing, as over a prodigal son returned. In recent years the framework provided by quantum field theory and functional in tegrals, developed over half a century in theoretical physics, have proved a fertile soil for developments in low dimensional topology and especially knot theory. Given this background it was particularly pleasing that NATO was able to generously sup port an Advanced Research Workshop to be held in Cambridge, England from 6th to 12th September 1992 with the title Low Dimensional Topology and Quantum Field Theory. Although independently organised this overlapped as far as some speak ers were concerned with a longer term programme with the same title organised by Professor M Green, Professor E Corrigan and Dr R Lickorish. The contents of this proceedings of the workshop demonstrate the breadth of topics now of interest on the interface between theoretical physics and mathematics as well as the sophistication of the mathematical tools required in current theoretical physics."

Elastic and inelastic scattering in transmission electron microscopy (TEM) are important research subjects. For a long time, I have wished to systematically summarize various dynamic theories associated with quantitative electron micros copy and their applications in simulations of electron diffraction patterns and images. This wish now becomes reality. The aim of this book is to explore the physics in electron diffraction and imaging and related applications for materials characterizations. Particular emphasis is placed on diffraction and imaging of inelastically scattered electrons, which, I believe, have not been discussed exten sively in existing books. This book assumes that readers have some preknowledge of electron microscopy, electron diffraction, and quantum mechanics. I anticipate that this book will be a guide to approaching phenomena observed in electron microscopy from the prospects of diffraction physics. The SI units are employed throughout the book except for angstrom (A), which is used occasionally for convenience. To reduce the number of symbols used, the Fourier transform of a real-space function P'(r), for example, is denoted by the same symbol P'(u) in reciprocal space except that r is replaced by u. Upper and lower limits of an integral in the book are (-co, co) unless otherwise specified. The (-co, co) integral limits are usually omitted in a mathematical expression for simplification. I very much appreciate opportunity of working with Drs. J. M. Cowley and J. C. H. Spence (Arizona State University), J.

This book had its origins in lectures presented at EPFL, Lausanne, during two separate visits (the most recent being to IRRMA). The author is most grateful to Professors A. Baldereschi, R. Car, and A. Quattropani for making these visits possible, and for the splendidly stimulating environment provided. Professors S. Baroni and R. Resta also influenced considerably the presentation of material by constructive help and comments. Most importantly, Chapters 4 and 5 were originally prepared for a review article by Professor G. Senatore, then at Pavia and now in Trieste, and myself for Reviews of Modem Physics (1994). In the 'course of this collaboration, he has taught me a great deal, especially about quantum Monte Carlo procedures, and Chapter 5 is based directly on this review article. Also in Chapter 4, my original draft on Gutzwiller's method has been transformed by his deeper understanding; again this is reflected directly in Chapter 4; especially in the earlier sections. In addition to the above background, it is relevant here to point out that, as a backcloth for the present, largely "state of the art," account, there are two highly relevant earlier books: The Many-body Problem in Quantum Mechanics with W.

From March 30th to April 3rd, 1992, a NATO Advanced Research workshop entitled "Time Dependent Quantum Molecular Dynamics: Theory and Experiment" was held at Snowbird, Utah. The organizing committee consisted of J. BROECKHOVE (Antwerp, Belgium), L. CEDERBAUM (Heidelberg, Germany), L. LATHOUWERS (Antwerp, Belgium), N. OHRN (Gainesville, Florida) and J. SIMONS (Salt Lake City, Utah). Fifty-two participants from eleven different countries attended the meeting at which thirty-three talks and one poster session were held. Twenty-eight participants submitted contributions to the proceedings of the meeting, which are reproduced in this volume. The workshop brought together experts in different areas 0 f molecular quantum dynamics, all adhering to the time dependent approach. The aim was to discuss and compare methods and applications. The ~amiliarityo~ the aUdience with the concepts o~ time dependent approaches greatly facilitated topical discussions and probing towards new applications. A broad area of subject matter was covered including time resolved laser chemistry, intramolecular dynamics, photodissociation dynamics, reactive and inelastic collisions as well as new time dependent methodologies. This diversity in applications is reflected in the contributions included in this volume .

The theory of the inhomogeneous electron gas had its origin in the Thomas Fermi statistical theory, which is discussed in the first chapter of this book. This already leads to significant physical results for the binding energies of atomic ions, though because it leaves out shell structure the results of such a theory cannot reflect the richness of the Periodic Table. Therefore, for a long time, the earlier method proposed by Hartree, in which each electron is assigned its own personal wave function and energy, dominated atomic theory. The extension of the Hartree theory by Fock, to include exchange, had its parallel in the density description when Dirac showed how to incorporate exchange in the Thomas-Fermi theory. Considerably later, in 1951, Slater, in an important paper, showed how a result similar to but not identical with that of Dirac followed as a simplification of the Hartree-Fock method. It was Gombas and other workers who recognized that one could also incorporate electron correlation consistently into the Thomas-Fermi-Dirac theory by using uniform electron gas relations locally, and progress had been made along all these avenues by the 1950s."

This volume contains the Proceedings of the Third International Conference on Navier-Stokes Equations and Related Nonlinear Problems. The conference was held in Funchal (Madeira, Portugal), on May 21-27, 1994. In addition to the editor, the organizers were Carlos Albuquerque (FC, University of Lisbon), Casimiro Silva (University of Madeira) and Juha Videman (1ST, Technical University of Lisbon). This meeting, following two other successful events of similar type held in Thurnau (Germany) in 1992 and in Cento (Italy) in 1993, brought together, to the majestically beautiful island of Madeira, more than 60 specialists from all around the world, of which about two thirds were invited lecturers. The main interest of the meeting was focused on the mathematical analysis of nonlinear phenomena in fluid mechanics. During the conference, we noticed that this area seems to provide, today more than ever, challenging and increasingly important problems motivating the research of both theoretical and numerical analysts. This volume collects 32 articles selected from the invited lectures and contributed papers given during the conference. The main topics covered include: Flows in Unbounded Domains; Flows in Bounded Domains; Compressible Fluids; Free Boundary Problems; Non-Newtonian Fluids; Related Problems and Numerical Approximations. The contributions present original results or new surveys on recent developments, giving directions for future research. I express my gratitude to all the authors and I am glad to recognize the scientific level and the actual interest of the articles.

In the slightly more than thirty years since its formulation, the Hubbard model has become a central component of modern many-body physics. It provides a paradigm for strongly correlated, interacting electronic systems and offers insights not only into the general underlying mathematical structure of many-body systems but also into the experimental behavior of many novel electronic materials. In condensed matter physics, the Hubbard model represents the simplest theoret ical framework for describing interacting electrons in a crystal lattice. Containing only two explicit parameters - the ratio ("Ujt") between the Coulomb repulsion and the kinetic energy of the electrons, and the filling (p) of the available electronic band - and one implicit parameter - the structure of the underlying lattice - it appears nonetheless capable of capturing behavior ranging from metallic to insulating and from magnetism to superconductivity. Introduced originally as a model of magnetism of transition met als, the Hubbard model has seen a spectacular recent renaissance in connection with possible applications to high-Tc superconductivity, for which particular emphasis has been placed on the phase diagram of the two-dimensional variant of the model. In mathematical physics, the Hubbard model has also had an essential role. The solution by Lieb and Wu of the one-dimensional Hubbard model by Bethe Ansatz provided the stimulus for a broad and continuing effort to study "solvable" many-body models. In higher dimensions, there have been important but isolated exact results (e. g., N agoaka's Theorem)."

The Seventh International Symposium on Gaseous Dielectrics was held in Knoxville, Tennessee, U. S. A. , on April 24-28, 1994. The symposium continued the interdisciplinary character and comprehensive approach of the preceding six symposia. Gaseous DielecIries VII is a detailed record of the symposium proceedings. It covers recent advances and developments in a wide range of basic, applied and industrial areas of gaseous dielectrics. It is hoped that Gaseous DielecIries VII will aid future research and development in, and encourage wider industrial use of, gaseous dielectrics. The Organizing Committee of the Seventh International Symposium on Gaseous Dielectrics consisted of G. Addis (U. S. A. ), L. G. Christophorou (U. S. A. ), F. Y. Chu (Canada), A. H. Cookson (U. S. A. ), O. Farish (U. K. ), I. Gallimberti (Italy) , A. Garscadden (U. S. A. ), D. R. James (U. S. A. ), E. Marode (France), T. Nitta (Japan), W. Pfeiffer (Germany), Y. Qiu (China), I. Sauers (U. S. A. ), R. J. Van Brunt (U. S. A. ), and W. Zaengl (Switzerland). The local arrangements committee consisted of members of the Health Sciences Research Division and personnel of the Conference Office of the Oak Ridge National Laboratory, and staff of the University of Tennessee (UTK). The contributions of each member of these committees, the work of the Session Chairmen, the interest of the participants, and the advice of innumerable colleagues are gratefully acknowledged. I am especially indebted to Dr. Isidor Sauers, Dr. David R. James, Mrs.

The authors aim to hone the theory of electron-atom and electron-ion collisions by developing mathematical equations and comparing their results to the wealth of recent experimental data. This first of three parts focuses on potential scattering, and will serve as an introduction to many of the concepts covered in Parts II and III. As these processes occur in so many of the physical sciences, researchers in astrophysics, atmospheric physics, plasma physics, and laser physics will all benefit from the monograph.

Covering both theory and applications, this important work provides a comprehensive introduction to the modern theory of X-ray and electronic spectra of free atoms. Romas Karazija discusses methods of angular momenta, irreducible tensorial operators, and coefficients of fractional parentage and their use in determining cross sections and probabilities of elementary processes. In addition, Karazija addresses the structure of electronic shells with inner vacancies and many-body effects.

This volume contains the invited papers and selected contributed papers presented at the biennial International Symposium on ELECTRON COLLISIONS WITH MOLECULES, CLUSTERS AND SURF ACES held at Royal Holloway, University of London from 29th to 30th July, 1993. This Symposium was a Satellite Meeting of the XVIII International Conference on the Physics of Electronic and Atomic Collisions (ICPEAC) and follows a 16 year tradition of Satellite Conferences in related areas of collisions held in association with previous ICPEAC's. In the past each of these electron -molecule symposia covered the broad field of electron-molecule scattering at rather low energies, but also included hot topics. This time as well as covering the whole field, well defined electron collisions with clusters and with particles in the complex potential of a surface were emphasized. Not many details are known about such collisions, although they become more and more important in surface characterisation, plasma-wall interactions, electron induced desorption and reorganisation of adsorbed particles. Recently, much work, theoretical and experimental, has been devoted to electron collisions with rather large carbon, silicon and halogen containing molecules. These problems are of relevance in plasma assisted thin film formation and etching of surfaces and can now be approached with advanced theoretical methods and experimental equipment.

Multiply charged ions have always been in the focus of atomic physics, astrophysics, plasma physics, and theoretical physics. Within the last few years, strong progress has been achieved in the development of ion sources, ion storage rings, ion traps, and methods to cool ions. As a consequence, nowadays, experiments with ensembles of multiply charged ions of brilliant quality are performed in many laboratories. The broad spectrum of the experiments demonstrates that these ions are an extremely versatile tool for investigations in pure and applied physics. It was the aim of this ASI to bring together scientists working in different fields of research with multiply charged ions in order to get an overview of the state of the art, to sound out possibilities for fruitful cooperations, and to discuss perspectives for the future. Accordingly, the programme of the ASI reached from established areas like QED calculations, weak interactions, x-ray astronomy, x-ray lasers, multi photon excitation, heavy-ion induced fusion, and ion-surface interactions up to the very recently opened areas like bound-beta decay, laser and x-ray spectroscopy, and spectrometry of ions in rings and traps, and the interaction of highly charged ions with biological cells. Impressive progress in nearly all of the fields could be reported during the meeting which is documented by the contributions to this volume. The theoretical understand ing of QED and correlation effects in few-electron heavy ions is rapidly developing."

The Nato Advanced Study Institute "Phase Transitions in Liquid Crystals" was held May 2-12, 1991, in Erice, Sicily. This was the 16th conference organized by the International School of Quantum Electronics, under the auspices of the "Ettore Majorana" Centre for Scientific Culture. The subject of "Liquid Crystals" has made amazing progress since the last ISQE Course on this subject in 1985. The present Proceedings give a tutorial introduction to today's most important areas, as well as a review of current results by leading researchers. We have brought together some of the world's acknowledged experts in the field to summarize both the present state of their research and its background. Most of the lecturers attended all the lectures and devoted their spare hours to stimulating discussions. We would like to thank them all for their admirable contributions. The Institute also took advantage of a very active audience; most of the students were active researchers in the field and contributed with discussions and seminars. Some of these student seminars are also included in these Proceedings. We did not modify the original manuscripts in editing this book, but we did group them according to the following topics: 1) "Theoretical Foundations"; 2) "Thermotropic Liquid Crystals"; 3) "Ferroelectric Liquid Crystals"; 4) "Polymeric Liquid Crystals"; and 5) "Lyotropic Liquid Crystals".

These are the proceedings of the 141h Winter \Vorkshop on Nuclear Dynamics, the latest of a serif'S of workshops that was started in 1~)78. This series has grown into a tradition. bringing together experimental and theoretical expertise from all areas of the study of nudear dynamics. Following tllf' tradition of the Workshop the program covered a broad range of topics aerof'S a large energy range. At the low energy end llluitifragmentation and its relationship to the nuclear liquid to gas phase transition was disclIssf'd in grf'at df'- tail. New pxpf'rimental data, refined analysis techniques, and new theoretical effort have lead to considerable progress. In the AGS energy range we see the emergence of systematic data that contribute to our understanding of the reaction dynamics. The workshop also showf'd that at CERN energies Itadronic data become much more precise and complet.e and a renewed emphasis on basic hadronic processes and hadronic struc- ture as a precondition to understand the initial conditions and a basis for systematic comparisons. Wolfgang Bauer Michigan State Univcr'sity Hans-Georg Ritter Lawrence Berkeley National Laboratory v PREVIOUS WORKSHOPS The following table contains a list of the dates and locations of the previous Winter Workshops on Nuclear Dynamics as well as the members of the organizing committees. The chairpersons of the conferences are underlined.

The seventh Advanced Study Institute (ASI) on Techniques and Concepts of High Energy Physics was held for the second time at the Club St. Croix, in St. Croix, U.S. Virgin Islands. The ASI brought together a total of 75 participants, from 19 countries. The primary support for the meeting was again provided by the Scientific Affairs Division of NATO. The ASI was cosponsored by the U.S. Department of Energy, by Fermilab, by the National Science Foundation, and by the University of Rochester. A special contribution from the Oliver S. and Jennie R. Donaldson Charitable Trust provided an important degree of flexibility, as well as support for worthy students from developing countries. As in the case of the previous ASIs, the scientific program was designed for advanced graduate students and recent PhD recipients in experimental particle physics. The present volume of lectures should complement the material published in the first six ASIs, and prove to be of value to a wider audience of physicists.

The II. International Conference on Ion Beam Surface Layer Analysis was held on September 15-19, 1975 at the Nuclear Research Center, Karlsruhe, Germany. The date fell between two related con ferences: "Application of Ion-Beams to Materials" at Warwick, Eng land and "Atomic Collisions in Solids" at Amsterdam, the Nether lands. The first conference on Ion Beam Surface Layer Analysis was held at Yorktown Heights, New York, 1973. The major topic of that and the present conference was the material analysis with ion beams including backscattering and channeling, nuclear reactions and ion induced X-rays with emphasis on technical problems and no vel applications. The increasing interest in this field was docu mented by 7 invited papers and 85 contributions which were presen ted at the meeting in Karlsruhe to about 150 participants from 21 countries. The oral presentations were followed by parallel ses sions on "Fundamental Aspects," "Analytical Problems" and "Appli cations" encouraging detailed discussions on the topics of most current interest. Summaries of these sessions were presented by the discussion leaders to the whole conference. All invited and contributed papers are included in these proceedings; summaries of the discussion sessions will appear in a separate booklet and are availble from the editors. The application of ion beams to material analysis is now well established."

The International Workshop on Quantum Communications and Measurement was held at the University of Nottingham from July 10-16, 1994. It followed the successful meeting on Quantum Aspects of Optical Communications in Paris in November 1990. This time the conference was devoted to mathematical, physical and engineering aspects of quantum noise, signal processing and quantum informa tion in open systems, quantum channels, and optical communications. It brought research workers in the experimental and engineering aspects of quantum optics and communication systems into contact with theoreticians working in quantum probability and measurement theory. The workshop was attended by more than 130 participants from 22 different countries. The largest groups after the UK (31)] were from Japan (19) and from Russia (14). The subjects discussed included the mathematical foundations of quantum communication systems, experiments and devices, the problem of collapse and continuous measurement, quantum input and output processes, causality and nondemolition observation, squeezed states, quan tum jumps, state diffusion and spontaneous localization, filtering and control in quantum systems, and new quantum optical phenomena and effects, including non classical light. These new mathematical and physical ideas were stimulated by recent advances in generation and detection of light with low quantum noise and the development of techniques for trapping a single atom over an extended period of time, making it possible to observe individual quantum phenomena at the macroscopic level."

of available information. Even more importantly, some authors who have contributed substantially to an area may have been overlooked. For this I apologize. I have, however, not attempted to trace techniques or observa tions historically, so there is no implication (unless specified) that the authors referred to were or were not the originators of a given method or observation. I would like to acknowledge discussions with co-workers at SFU for input relative to their specialties, to acknowledge the help of students who have pointed out errors and difficulties in the earlier presentation, and to acknowledge the infinite patience of my wife Phyllis while I spent my sabbatical and more in libraries and punching computers. S. Roy Morrison 0 1 Contents Notation XV 1. Introduction 1 1. 1. Surface States and Surface Sites . 1 1. 1. 1. The Chemical versus Electronic Representation of the Surface. 1 1. 1. 2. The Surface State on the Band Diagram 4 1. 1. 3. The Fermi Energy in the Surface State Model. 6 1. 1. 4. Need for Both Surface Site and Surface State Models 6 1. 2. Bonding of Foreign Species to the Solid Surface 7 1. 2. 1. Types of Interaction. 7 1. 2. 2. The Chemical Bond . 10 1. 2. 3. Acid and Basic Surface Sites on Solids . 13 1. 2. 4. Adsorbate Bonding on Various Solid Types. 16 1. 2. 5. Movement of Surface Atoms: Relaxation, Reconstruction, and Relocation ."

This book is the result of a NATO Advanced Research Workshop held in Vimeiro, Portugal, in May 1992. The objectives of this Workshop were: i) to promote exchange of knowledge between experts in various fields of discharge modeling, plasma diagnostics and microwave plasma applications; ii) to assess the state-of-the-art in this field from a multidisciplinary viewpoint; iii) to identify basic points needing clarification and to estab- lish basic guidelines for future research; iv) to compare the properties of microwave dis- charges to those of RF discharges, as plasma sources for specific applications. Most of the contributors to this book are well known scientists in the field of mi- crowave discharge sources, modeling, diagnostics and applications. The book provides an up-to-date review in this field which should be useful for both the fundamentalists and those using these systems in applications such as surface treatment and elemental analysis. We are gmteful to a number of organizations for providing the fmancial assistance that made the Workshop possible. Foremost is the NATO Scientific Affairs Division, which provided the major contribution for the Workshop. In addition, the following Por- tuguese sources made contributions: Instituto Nacional de Investiga~iio Cientifica, Junta Nacional de Investiga~iio Cientifica e Tecnologica, Centro de Electrodinamica da Univer- sidade Tecnica de Lisboa, Instituto Superior Tecnico, Banco Nacional Ultmmarino, and Regiiio de Turismo do Oeste.

The book is devoted to the physical properties of nonideal plasma, in which the effects of interparticle interactions are substantial. Such a plasma is usually compressed so strongly that it is called dense plasma. Interest in plasma studies has increased over the last 10 or 15 years, owing to the development of modern technology and sophisticated facilities whose oper ation is based on a high energy density. As a result of a recent sharp increase in the number of experimental and theoretical investigations, much interesting and reliable data on the properties of dense plasma have been obtained. The data are distributed in a rapidly growing number of original publications and reviews. This volume is a systematic treatment of the thermodynamics (ionization equilibrium, particle composition), charge transport properties (especially electric con ductivity), optical properties (peculiarities of continuous and discrete spectra), and collective modes (features and manifestations) of nonideal plasma. Theoretical models are considered along with the experimental data. The book is intended for the wide range of readers, including specialists in plasma physics and various researchers who need knowledge in this field.

For more than a century, studies of atomic hydrogen have been a rich source of scientific discoveries. These began with the Balmer series in 1885 and the early quantum theories of the atom, and later included the development of QED and the first successful gauge field theory. Today, hydrogen and its relatives continue to provide new fundamental information, as witnessed by the contributions to this book. The printed volume contains invited reviews on the spectroscopy of hydrogen, muonium, positronium, few-electron ions and exotic atoms, together with related topics such as frequency metrology and the determination of fundamental constants. The accompanying CD contains, in addition to these reviews, a further 40 contributed papers also presented at the conference "Hydrogen Atom 2" held in summer 2000. Finally, to facilitate a historical comparison, the CD also contains the proceedings of the first "Hydrogen Atom" conference of 1988. The book includes a foreword by Norman F. Ramsey.

This book has been written as part of a series of scientific books being published by Plenum Press. The scope of the series is to review a chosen topic in each volume. To supplement this information, the abstracts to the most important references cited in the text are reprinted, thus allowing the reader to find in-depth material without having to refer to many additional publications. This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing. Although a number of books have appeared dealing with this area of physics and chemistry, these all deal with parts of the field. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI. Examples are given throughout the fundamental sections, in order to give the reader a better insight in the meaning and magnitude of the many parameters relevant to dry etching. Electrical engineering concepts are emphasized to explain the pros and cons of reactor concepts and excitation frequency ranges. In the description of practical applications, extensive use is made of cross-referencing between processes and materials, as well as theory and practice. It is thus intended to provide a total model for understanding dry etching. The book has been written such that no previous knowledge of the subject is required. It is intended as a review of all aspects of dry etching for silicon semiconductor processing.