This book provides an in-depth, comprehensive and up-to-date coverage of the subject of plasma charging damage in modern VLSI circuit manufacturing. It is written for beginners as well as practitioners. For beginners, this book presents an easy-to-follow, unified explanation of various charging-damage phenomena, the goal being to provide them with a solid foundation for taking on real damage problems encountered in VLSI manufacturing. For practitioners, it can help bridge the gap between disciplines by providing all of the necessary background materials in one place.Drawing on the author's wide range of experience in plasma science, processing technologies, device physics and reliability physics, the text includes information on: - plasma and mechanisms of plasma damage;- wear-out and breakdown of thin gate-oxides;- the impact of processing equipment on damage;- methods of damage measurement;- damage management; - gate-oxide scaling.

Phase transition phenomena in solids are of vital interest to physicists, materials scientists, and engineers who need to understand and model the mechanical behavior of solids during various kinds of phase transformations. This volume is a collection of 29 written contributions by distinguished invited speakers from 14 countries to the IUTAM Symposium on Mechanics of Martensitic Phase Transformation in Solids, the first IUTAM Symposium focusing on this topic. It contains basic theoretical and experimental aspects of the recent advances in the mechanics research of martensitic phase transformations. The main topics include microstructure and interfaces, material instability and its propagation, micromechanics approaches, interaction between plasticity and phase transformation, phase transformation in thin films, single and polycrystalline shape memory alloys, shape memory polymers, TRIP steels, etc. Due to the multidisciplinary nature of the research covered, this volume will be of interest to researchers, graduate students and engineers in the field of theoretical and applied mechanics as well as materials science and technology.

Soils are complex materials: they have a particulate structure and fluids can seep through pores, mechanically interacting with the solid skeleton. Moreover, at a microscopic level, the behaviour of the solid skeleton is highly unstable. External loadings are in fact taken by grain chains which are continuously destroyed and rebuilt. Many issues of modeling, even of the physical details of the phenomena, remain open, even obscure; de Gennes listed them not long ago in a critical review. However, despite physical complexities, soil mechanics has developed on the assumption that a soil can be seen as a continuum, or better yet as a medium obtained by the superposition of two and sometimes three con and the other fluids, which occupy the same portion of tinua, one solid space. Furthermore, relatively simple and robust constitutive laws were adopted to describe the stress-strain behaviour and the interaction between the solid and the fluid continua. The contrast between the intrinsic nature of soil and the simplistic engi neering approach is self-evident. When trying to describe more and more sophisticated phenomena (static liquefaction, strain localisation, cyclic mo bility, effects of diagenesis and weathering, ..... ), the nalve description of soil must be abandoned or, at least, improved. Higher order continua, incrementally non-linear laws, micromechanical considerations must be taken into account. A new world was opened, where basic mathematical questions (such as the choice of the best tools to model phenomena and the proof of the well-posedness of the consequent problems) could be addressed."

Force and motion control systems of varying degrees of sophistication have shaped the lives of all individuals living in industrialized countries all over the world, and together with communication technology are largely responsible for the high standard ofliving prevalent in many communities. The brains of the vast majority of current control systems are electronic, in the shape of computers, microprocessors or programmable logic controllers (PLC), the nerves are provided by sensors, mainly electromech anical transducers, and the muscle comprises the drive system, in most cases either electric, pneumatic or hydraulic. The factors governing the choice of the most suitable drive are the nature of the application, the performance specification, size, weight, environ mental and safety constraints, with higher power levels favouring hydraulic drives. Past experience, especially in the machine tool sector, has clearly shown that, in the face of competition from electric drives, it is difficult to make a convincing case for hydraulic drives at the bottom end of the power at fractional horsepower level. A further, and frequently range, specifically overriding factor in the choice of drive is the familiarity of the system designer with a particular discipline, which can inhibit the selection of the optimum and most cost-effective solution for a given application. One of the objectives of this book is to help the electrical engineer overcome his natural reluctance to apply any other than electric drives."

The ultrasonic velocity profile (UVP) method, first developed in medical engineering, is now widely used in clinical settings. The fluid mechanical basis of UVP was established in investigations by the author and his colleagues with work demonstrating that UVP is a powerful new tool in experimental fluid mechanics. There are diverse examples, ranging from problems in fundamental fluid dynamics to applied problems in mechanical, chemical, nuclear, and environmental engineering. In all these problems, the methodological principle in fluid mechanics was converted from point measurements to spatio-temporal measurements along a line. This book is the first monograph on UVP that offers comprehensive information about the method, its principles, its practice, and applied examples, and which serves both current and new users. Current users can confirm that their application configurations are correct, which will help them to improve the configurations so as to make them more efficient and effective. New users will become familiar with the method, to design applications on a physically correct basis for performing measurements accurately. Additionally, the appendix provides necessary practical information, such as acoustic properties.

Because of its versatility in analyzing a broad range of applications, multibody dynamics has grown in the past two decades to be an important tool for designing, prototyping, and simulating complex articulated mechanical systems. This textbooka "a result of the authora (TM)s many years of research and teachinga "brings together diverse concepts of dynamics, combining the efforts of many researchers in the field of mechanics. Bridging the gap between dynamics and engineering applications such as microrobotics, virtual reality simulation of interactive mechanical systems, nanomechanics, flexible biosystems, crash simulation, and biomechanics, the book puts into perspective the importance of modeling in the dynamic simulation and solution of problems in these fields.

To help engineering students and practicing engineers understand the rigid-body dynamics concepts needed for the book, the author presents a compiled overview of particle dynamics and Newtona (TM)s second law of motion in the first chapter. A particular strength of the work is its use of matrices to generate kinematic coefficients associated with the formulation of the governing equations of motion. Additional features of the book include:

* numerous worked examples at the end of each section

* introduction of boundary-element methods (BEM) in the description of flexible systems

* up-to-date solution techniques for rigid and flexible multibody dynamics using finite- element methods (FEM)

* inclusion of MATLAB-based simulations and graphical solutions

* in-depth presentation of constrained systems

* presentation of the general form of equations of motion ready for computerimplementation

* two unique chapters on stability and linearization of the equations of motion

Junior/senior undergraduates and first-year graduate engineering students taking a course in dynamics, physics, control, robotics, or biomechanics will find this a useful book with a strong computer orientation towards the subject. The work may also be used as a self-study resource or research reference for practitioners in the above-mentioned fields.

This revised, updated edition provides a comprehensive and rigorous description of the application of Hamilton's principle to continuous media. To introduce terminology and initial concepts, it begins with what is called the first problem of the calculus of variations. For both historical and pedagogical reasons, it first discusses the application of the principle to systems of particles, including conservative and non-conservative systems and systems with constraints. The foundations of mechanics of continua are introduced in the context of inner product spaces. With this basis, the application of Hamilton's principle to the classical theories of fluid and solid mechanics are covered. Then recent developments are described, including materials with microstructure, mixtures, and continua with singular surfaces.

The first Workshop on Mechanisms, Transmissions and Applications -- MeTrApp-2011 was organized by the Mechatronics Department at the Mechanical Engineering Faculty, "Politehnica" University of Timisoara, Romania, under the patronage of the IFToMM Technical Committees Linkages and Mechanical Controls and Micromachines. The workshop brought together researchers and students who work in disciplines associated with mechanisms science and offered a great opportunity for scientists from all over the world to present their achievements, exchange innovative ideas and create solid international links, setting the trend for future developments in this important and creative field. The topics treated in this volume are mechanisms and machine design, mechanical transmissions, mechatronic and biomechanic applications, computational and experimental methods, history of mechanism and machine science and teaching methods.

1. 1 Preliminary Concepts A cam mechanism is a mechanical system consisting of three basic components: a driving element, called the cam; a driven element, termed the follower; and a fixed frame. Sometimes, an intermediate element is introduced between the cam and the follower with the purpose of improving the mechanism performance. This element is called the roller because function is to produce a pure-rolling relative motion be tween the cam and the follower. The purpose ofa cam mechanism is the transmission of power or information. In applications concerning power transmission, the main good to be transmitted is force or torque; in applications ofinformation transmission, the main good transmitted takes the form of motion signals. Most modern appli cations of cam mechanisms, to be described shortly, are of the former type. Cam mechanisms used for information transmission were traditionally found in measuring instruments. With the advent ofmodern microprocessor-based hardware, this typeof application is becoming less common. Nevertheless, cam mechanisms are still used in a wide spectrum of applications, especially in automatic machines and instruments, textile machinery, computers, printing presses, food-processing equipment, internal combustion engines, control systems, and photographic equipment (Prenzel, 1989). In the design of cam mechanisms, the engineer performs several activities, namely, task definition, synthesis, analysis, optimization, and dynamic simulation. These tasks do not always follow this order. In fact, some loops may appear in the foregoing tasks, such as those illustrated in Fig. 1. 1. 1."

This book develops methods to simulate and analyze the time-dependent changes of stress and strain states in engineering structures up to the critical stage of creep rupture. The objective of this book is to review some of the classical and recently proposed approaches to the modeling of creep for structural analysis applications. It also aims to extend the collection of available solutions of creep problems by new, more sophisticated examples.

describes more than thirty Physics practicals at high school and undergraduate level. There's background information on each one, a description of the equipment needed, and how the experiment is performed. Uniquely, for those without access to a real laboratory, the book gives you access to highly detailed 3d simulations of all the experiments.

The International Conference on the Theory of Machines and Mechanisms is organized every four years, under the auspices of the International Federation for the Promotion of Mechanism and Machine Science (IFToMM) and the Czech Society for Mechanics. This eleventh edition of the conference took place at the Technical University of Liberec, Czech Republic, 4-6 September 2012. This volume offers an international selection of the most important new results and developments, in 73 papers, grouped in seven different parts, representing a well-balanced overview, and spanning the general theory of machines and mechanisms, through analysis and synthesis of planar and spatial mechanisms, dynamics of machines and mechanisms, linkages and cams, computational mechanics, rotor dynamics, biomechanics, mechatronics, vibration and noise in machines, optimization of mechanisms and machines, control and monitoring systems of machines, accuracy and reliability of machines and mechanisms, robots and manipulators to the mechanisms of textile machines.

"Dynamic Response of Linear Mechanical Systems: Modeling, Analysis and Simulation" can be utilized for a variety of courses, including junior and senior-level vibration and linear mechanical analysis courses. The author connects, by means of a rigorous, yet intuitive approach, the theory of vibration with the more general theory of systems. The book features:

A seven-step modeling technique that helps structure the rather unstructured process of mechanical-system modeling

A system-theoretic approach to deriving the time response of the linear mathematical models of mechanical systems

The modal analysis and the time response of two-degree-of-freedom systems-the first step on the long way to the more elaborate study of multi-degree-of-freedom systems-using the Mohr circle

Simple, yet powerful simulation algorithms that exploit the linearity of the system for both single- and multi-degree-of-freedom systems

Examples and exercises that rely on modern computational toolboxes for both numerical and symbolic computations as well as a Solutions Manual for instructors, with complete solutions of a sample of end-of-chapter exercises

Chapters 3 and 7, on simulation, include in each "Exercises" section a set of miniprojects that require code-writing to implement the algorithms developed in these chapters

Presents a comprehensive review of classic hypersonic flow from the Newtonian theory to blast wave analogue. Introduces nonequilibrium chemical kinetics to gas dynamics for hypersonic flows in the high-enthalpy state. Integrates quantum mechanics to high-enthalpy hypersonic flows including dissociation and ionization. Covers the complete heat transfer process with radiative energy transfer for thermal protection of earth reentry vehicle. Develops and verifies the interdisciplinary governing equations for understanding and analyzing realistic hypersonic flows.

Explores the history and significance of interplanetary space missions. Features detailed explanations and mathematical methods for trajectory optimization. Includes detailed explanations and mathematical methods for mission analysis for interplanetary missions. Covers the introduction, mathematical methods, and applications of the N-body problem (N>2). Discusses navigation and targeting for interplanetary mission.

Many important phenomena in fluid motion are evident in vortex flow, i.e., flows in which vortical structures are significant in determining the whole flow. This book, which consists of lectures given at a NATO ARW held in Grenoble (France) in June 1992, provides an up-to-date account of current research in the study of these phenomena by means of numerical methods and mathematical modelling. Such methods include Eulerian methods (finite difference, spectral and wavelet methods) as well as Lagrangian methods (contour dynamics, vortex methods) and are used to study such topics as 2- or 3-dimensional turbulence, vorticity generation by solid bodies, shear layers and vortex sheets, and vortex reconnection. For researchers and graduate students in computational fluid dynamics, numerical analysis, and applied mathematics.

Successfully classroom-tested at the graduate level, Linear Control Theory: Structure, Robustness, and Optimization covers three major areas of control engineering (PID control, robust control, and optimal control). It provides balanced coverage of elegant mathematical theory and useful engineering-oriented results.

The first part of the book develops results relating to the design of PID and first-order controllers for continuous and discrete-time linear systems with possible delays. The second section deals with the robust stability and performance of systems under parametric and unstructured uncertainty. This section describes several elegant and sharp results, such as Kharitonov's theorem and its extensions, the edge theorem, and the mapping theorem. Focusing on the optimal control of linear systems, the third part discusses the standard theories of the linear quadratic regulator, Hinfinity and l1 optimal control, and associated results.

Written by recognized leaders in the field, this book explains how control theory can be applied to the design of real-world systems. It shows that the techniques of three term controllers, along with the results on robust and optimal control, are invaluable to developing and solving research problems in many areas of engineering.

A-Z Guide for Maximum Cost Reduction and Increased Equipment Reliability

To remain globally competitive, today 's manufacturing operations have greatly improved, but there is one last link in the advancement evolution. The reliability of manufacturing equipment must be improved in order to maximize the productive life of the equipment, eliminate unscheduled shut downs, and reduce operating costs. These are key components to maintaining a smooth work flow and a competitive edge.

Written by peer-recognized industry experts, Lubrication and Maintenance of Industrial Machinery: Best Practices and Reliability provides the necessary tools for maintenance professionals who are responsible for the overall operational functions. With chapters culled from the second edition of the Handbook of Lubrication and Tribology, Volume 1 and a new introductory chapter, this more specialized and focused work supplies critical lubrication information that can be used on a daily basis to achieve greater machine reliability. Incorporating lean methods, this resource can be used by everyone involved in the production process, from supervisors to floor personnel.

Recommended for STLE 's Certified Lubrication Specialist Certification

In addition to lubrication program development and scheduling, this volume also covers critical elements of the reliability equation, such as:

• Deterioration detection and measurement
• Lubrication cleanliness and contamination control
• Environmental implications of various lubricants
• Energy conservation
• Storage and handling
• Recycling of used oils

This book fills a niche by specifically and comprehensively focusing on lubrication as part of the overall maintenance program. Under the editorial guidance of two of the most respected names in the field, this seminal work is destined to become an industry standard.

This volume contains invited lectures and contributed papers presented at the NATO Advanced Research Workshop on Mathematical Modeling in Combustion and related topics, held in. Lyon (France), April 27 - 30, 1987. This conference was planned to fit in with the two-month visit of Professor G.S.S. Ludford to the Ecole Centrale de Lyon. He kindly agreed to chair the Scientific and Organizing Committee and actively helped to initiate the meeting. His death in December 1986 is an enormous loss to the scientific community in general, and in particular, to the people involved in the present enterprise. The subject of mathematical modeling in combustion is too large for a single conference, and the selection of topics re flects both areas of recent research activity and areas of in terest to Professor G.S.S. Ludford, to whose memory the Advanced Workshop and this present volume are dedicated. The meeting was divided into seven specialized sessions detonation theory, mathematical analysis, numerical treatment of combustion problems, flame theory, experimental and industrial aspects, complex chemistry, and turbulent combustion. It brought together researchers and engineers from University and Industry (see below the closing remarks of the workshop by Prof. N. Peters). The articles in this volume have been judged and accepted on their scientific quality, and language corrections may have been sacrificed in order to allow quick dissemination of knowledge to prevail."

While ultra-precision machines are now achieving sub-nanometer accuracy, unique challenges continue to arise due to their tight specifications. Written to meet the growing needs of mechanical engineers and other professionals to understand these specialized design process issues, Introduction to Precision Machine Design and Error Assessment places a particular focus on the errors associated with precision design, machine diagnostics, error modeling, and compensation.

"Error Assessment and Control"

The book begins with a brief overview of precision engineering and applications before introducing error measurements and offering an example of a numerical-controlled machine error assessment. The contributors discuss thermal error sources and transfer, modeling and simulation, compensation, and machine tool diagnostics, and then examine the principles and strategies involved in designing standard-size precision machines.

Later chapters consider parallel kinematic machines, the precision control techniques covering linear systems and nonlinear aspects, and various types of drives, actuators, and sensors required for machines. Case studies and numerous diagrams and tables are provided throughout the book to clarify material.

"A Window Into the Future of High-Precision Manufacturing"

Achieving ultra-high precision in the manufacture of extremely small devices opens up prospects in several diverse and futuristic fields, while at the same time greatly increases our living standards by offering quality and reliability for conventional products and those on the microscale. With contributions by a team of international experts, this work serves as a comprehensive and authoritativereference for professionals aiming to stay abreast of this developing area.

Shell structures are widely used in the fields of civil, mechanical, architectural, aeronautical, and marine engineering. Shell technology has been enhanced by the development of new materials and prefabrication schemes. Despite the mechanical advantages and aesthetic value offered by shell structures, many engineers and architects are relatively unacquinted with shell behaviour and design. This book familiarizes the engineering and architectural student, as well as the practicing engineer and architect, with the behaviour and design aspects of shell structures. Three aspects are presented: the Physical behaviour, the structural analysis, and the design of shells in a simple, integrated, and yet concise fashion. Thus, the book contains three major aspects of shell engineering: (1) physical understanding of shell behaviour; (2) use of applied shell theories; and (3) development of design methodologies together with shell design examples. The theoretical tools required for rational analysis of shells are kept at a modest level to give a sound grasp of the fundamentals of shell behaviour and, at the same time, an understanding of the related theory, allowing it to be applied to actual design problems. To achieve a physical understanding of complex shell behaviour, quantitative presentations are supplemented by qualitative discussions so that the reader can grasp the physical feeling' of shell behaviour. A number of analysis and detailed design examples are also worked out in various chapters, making the book a useful reference manual. This book can be used as a textbook and/or a reference book in undergraduate as well as graduate university courses in the fields of civil, mechanical, architectural, aeronautical, and materials engineering. It can also be used as a reference and design-analysis manual for the practicing engineers and architects. The text is supplemented by a number of appendices containing tables of shell analysis and design charts and tables.