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Books > Professional & Technical > Technology: general issues > Instruments & instrumentation engineering

System Design through Matlab (R), Control Toolbox and Simulink (R) (Paperback, Edition.): Krishna K. Singh, Gayatri Agnihotri System Design through Matlab (R), Control Toolbox and Simulink (R) (Paperback, Edition.)
Krishna K. Singh, Gayatri Agnihotri
R2,464 Discovery Miles 24 640 Ships in 10 - 15 working days

MATLAB , a software package developed by Math Works, Inc. is powerful, versatile and interactive software for scientific and technical computations including simulations. Specialised toolboxes provided with several built-in functions are a special feature of MATLAB .

This book titled System Design through MATLAB Control Toolbox and SIMULINK aims at getting the reader started with computations and simulations in system engineering quickly and easily and then proceeds to build concepts for advanced computations and simulations that includes the control and compensation of systems. Simulation through SIMULINK has also been described to allow the reader to get the feel of the real world situation.

This book is appropriate for undergraduate students undergoing final semester of their project work, postgraduate students who have MATLAB integrated in their course or wish to take up simulation problem in the area of system engineering for their dissertation work and research scholars for whom MATLAB along with toolboxes and SIMULINK is an indispensable tool for simulation.

To download interactive simulations of various systems (523Kb) described in the book, go to http//www.springer.co.uk/matlab.htm

Chemische Sensoren - Eine Einfuhrung Fur Naturwissenschaftler Und Ingenieure (German, Hardcover, 2004 ed.): Peter Grundler Chemische Sensoren - Eine Einfuhrung Fur Naturwissenschaftler Und Ingenieure (German, Hardcover, 2004 ed.)
Peter Grundler
R1,798 Discovery Miles 17 980 Ships in 10 - 15 working days

Die Forschung und Anwendungsentwicklung in dem Bereich chemischer und biochemischer Sensoren ist weiterhin in einem schnellen Wachstum begriffen. Die Erfahrungen des letzten Jahrzehnts haben jedoch gezeigt, dass die erfolgreiche Entwicklung solcher Sensoren, die auch den harten Routinebedingungen in den vielf ltigen Anwendungsgebieten widerstehen, nur dann m glich ist, wenn Chemiker und Ingenieure kooperieren. Daher ist es das Ziel dieses Lehrbuches, sowohl Chemikern als auch Ingenieuren, Lebensmittel- und Biotechnologen in einer streng systematischen aber sehr praxisorientierten Darstellung die Technologie und die Anwendung chemischer Sensoren nahezubringen.

Der interdisziplin re Ansatz berbr ckt die unterschiedlichen Denkweisen in Chemie, Physik und Ingenieurwissenschaften erfolgreich.

Electronics of Measuring Systems - Practical Implementation of Analogue & Dig Tech (Hardcover): T.T. Lang Electronics of Measuring Systems - Practical Implementation of Analogue & Dig Tech (Hardcover)
T.T. Lang
R15,688 Discovery Miles 156 880 Ships in 12 - 19 working days

A book which deals with the practical aspects of both analogue and digital electronic measuring systems. The author discusses these systems with the designer in mind, giving information which will help readers to use electronic measuring tools in the most effective way. Emphasis is placed on practical aspects of the use of electronic devices in measuring systems and to this end details of nearly one hundred applications are given including some specialized measurement and control systems. It has been assumed that readers will have a basic understanding of both electronics and measuring systems, so that theoretical and mathematical detail can be kept to a minimum. In translating his book from the original French, the author has modified and updated much of the material so that this will be an invaluable support to all those involved in the design of electronic measuring systems, or of larger complexes which include such systems. The book will also be of interest to people who are looking for an introduction to the use of electronics in measuring systems.

Instrumentation for Process Measurement and Control - Third Edition (Hardcover, 3rd edition): Norman A. Anderson Instrumentation for Process Measurement and Control - Third Edition (Hardcover, 3rd edition)
Norman A. Anderson
R3,531 Discovery Miles 35 310 Ships in 9 - 17 working days

:This Third Edition contains updated material on new equipment and probes further into topics introduced in previous editions. Instrumentation for Process Measurement and Control: Third Edition introduces the fields of process measurement and feedback control, provides useful reference material to students and practitioners, and bridges the gap between basic technology and more sophisticated systems that offer promise for the future. You will find expanded questions sections at the end of each chapter that will help with self-study and assessing your knowledge.

Industrial Statistics - Aims and Computational Aspects. Proceedings of the Satellite Conference to the 51st Session of the... Industrial Statistics - Aims and Computational Aspects. Proceedings of the Satellite Conference to the 51st Session of the International Statistical Institute (ISI), Athens, Greece, August 16-17, 1997. (Paperback, Softcover reprint of the original 1st ed. 1997)
Christos P. Kitsos, Lutz Edler
R1,530 Discovery Miles 15 300 Ships in 10 - 15 working days

Devoted to the growing impact of statistical methodology and statistical computing in industry the aim of this book is to link the three components: Statistics - industry - computers. Different areas of industrial statistics are presented by a number of excellent contributions. The following topics are covered: Quality control, engineering and monitoring; reliability and failure time analysis, experimental design; repeated measurements - multiple inference; pharma - statistics; computing, imaging and perception. This book concentrates on the interface between statistical needs in industry and statistical methods developed by statisticians and engineers.

High Sensitivity Moire - Experimental Analysis for Mechanics and Materials (Paperback, Softcover reprint of the original 1st... High Sensitivity Moire - Experimental Analysis for Mechanics and Materials (Paperback, Softcover reprint of the original 1st ed. 1994)
Daniel Post, Bongtae Han, Peter Ifju
R1,715 Discovery Miles 17 150 Ships in 10 - 15 working days

A description of both the theory and practice of physical measurements that use high-sensitivity moiré - principally moiré interferometry. The focus here is on the mechanics and micromechanics of materials and structural elements and the book includes new studies published for the first time. Diverse fields are addressed: advanced composite materials, thermal stresses, electronic packaging, fracture, metallurgy, time-dependence, strain gage calibration. All the methods can be applied for whole-field measurements on nearly and solid bodies. This reader-friendly book will serve engineers and scientists who are concerned with measurements of real phenomena, while also stimulating students to pursue the treasures of experimental analysis.

Infrastructure Asset Management with Power System Applications (Hardcover): Lina Bertling Tjernberg Infrastructure Asset Management with Power System Applications (Hardcover)
Lina Bertling Tjernberg
R5,138 Discovery Miles 51 380 Ships in 12 - 19 working days

Infrastructure Asset Management with Power System Applications is about infrastructure asset management, which can be expressed as the combination of management, financial, economic, and engineering, applied to physical assets with the objective of providing the required level of service in the most cost-effective manner. It includes management of the whole lifecycle of a physical asset from design, construction, commission, operation, maintenance, modification, decommissioning, and disposal. It covers budget issues and focuses on asset management of an infrastructure for energy-i.e., the electric power system. Features Offers a comprehensive reference book providing definitions, terminology, and basic theories as well as a comprehensive set of examples from a wide range of applications for the electric power system and its components. Spans a wide range of applications for the electric power system area, including real data and pictures. Contains results from recently published research and application studies. Includes a wide range of application examples for the electric power systems area from hydro, nuclear, and wind, plus shows future trends. Contributes to the overall goals of developing a sustainable energy system by providing methods and tools for a resource efficient use of physical assets in the electric power system area.

Analog Electronics for Radiation Detection (Paperback): Renato  Turchetta Analog Electronics for Radiation Detection (Paperback)
Renato Turchetta
R2,437 Discovery Miles 24 370 Ships in 12 - 19 working days

Analog Electronics for Radiation Detection showcases the latest advances in readout electronics for particle, or radiation, detectors. Featuring chapters written by international experts in their respective fields, this authoritative text: Defines the main design parameters of front-end circuitry developed in microelectronics technologies Explains the basis for the use of complementary metal-oxide semiconductor (CMOS) image sensors for the detection of charged particles and other non-consumer applications Delivers an in-depth review of analog-to-digital converters (ADCs), evaluating the pros and cons of ADCs integrated at the pixel, column, and per-chip levels Describes incremental sigma-delta ADCs, time-to-digital converter (TDC) architectures, and digital pulse-processing techniques complementary to analog processing Examines the fundamental parameters and front-end types associated with silicon photomultipliers used for single visible-light photon detection Discusses pixel sensors with per-pixel TDCs, channel density challenges, and emerging 3D technologies interconnecting detectors and electronics Thus, Analog Electronics for Radiation Detection provides a single source for state-of-the-art information on analog electronics for the readout of radiation detectors.

Design of Guidance and Control Systems for Tactical Missiles (Hardcover): Qi Zaikang, Lin Defu Design of Guidance and Control Systems for Tactical Missiles (Hardcover)
Qi Zaikang, Lin Defu
R4,482 Discovery Miles 44 820 Ships in 12 - 19 working days

Design of Guidance and Control Systems for Tactical Missiles presents a modern, comprehensive study of the latest design methods for tactical missile guidance and control. It analyzes autopilot designs, seeker system designs, guidance laws and theories, and the internal and external disturbances affecting the performance factors of missile guidance control systems. The text combines detailed examination of key theories with practical coverage of methods for advanced missile guidance control systems. It is valuable content for professors and graduate-level students in missile guidance and control, as well as engineers and researchers who work in the area of tactical missile guidance and control.

Stability Analysis for Linear Repetitive Processes (Paperback): Eric Rogers, David H. Owens Stability Analysis for Linear Repetitive Processes (Paperback)
Eric Rogers, David H. Owens
R1,515 Discovery Miles 15 150 Ships in 10 - 15 working days

Industrial processes such as long-wall coal cutting and me- tal rolling, together with certain areas of 2D signal and image processing, exhibit a repetitive, or multipass struc- ture characterized by a series of sweeps of passes through a known set of dynamics. The output, or pass profile, produced on each pass explicitly contributes to that produced on the text. This interpass interaction can lead to the growth of oscillations, and hence a form of instability, in the se- quence of pass profiles which require control strategies that explicitly incorporate the essential repetitive struc- ture of the process in their decision making. This monograph is unique in developing the new techniques necessary for sy- stematic control systems design in the form of a stability theory and computationally feasible stability tests based on finite simulations and polynomial analysis. Its development requires a basic knowledge of linear frequency domain and state-space theory and a knowledge of basic functional ana- lysis would be beneficial. The text is aimed at researchers in the area of control and systems theory and should also be of interest to those working in the related area of signal and image processing.

Temperature Measurement (Hardcover): Bela G Liptak Temperature Measurement (Hardcover)
Bela G Liptak
R4,767 Discovery Miles 47 670 Ships in 12 - 19 working days

Temperature Measurement covers nearly every type of temperature measurement device, in particular, bimetallic thermometers, filled bulb and glass stem thermometers, thermistors, thermocouples, and thermowells. Includes suppliers and prices.

Instrumentation: Transducers and Interfacing (Paperback, 2nd Revised edition): B. R. Bannister Instrumentation: Transducers and Interfacing (Paperback, 2nd Revised edition)
B. R. Bannister
R1,497 Discovery Miles 14 970 Ships in 10 - 15 working days

- - _vane \:: y;) \ c: =:: J ] 0=0 ] Dc: =JD Fig. 2. 39 Seven-segment devices for large displays and good visibility at up to 300 m can readily be obtained. Summary The number of transducer types is almost unlimited, and in order to bring our area of study down to a more manageable size we have considered transduc ers under four main headings. Input transducers for detecting mechanical change allow us to sense force, pressure, position, proximity, displacement, velocity, acceleration, vibration and shock in all their multiple manifestations. The basis of many mechanical sensors is the strain gauge which is usually used in a bridge configuration. Other devices such as the L VDT and synchro are also widely used. Temperature transducers form another large group, and we have looked at the operating principles of the major types, with some of the techniques used in compensating for non-ideal characteristics. Radiation and chemical sensing transducers form the remaining groups. Actuators rely almost entirely on electromagnetic action and, in modern equipment, occur most commonly as solenoids and relays, including the reed relay, and stepper motors. Visual displays also come in a bewildering range of types and sizes, but, because of their ease of interfacing with electronic circuitry, the majority are based on the LED and LCD. Review questions 1. What is meant by gauge factor? 2. Define Young's modulus. 3."

Hot-wire Anemometry - Principles and Signal Analysis (Hardcover, New): H.H. Bruun Hot-wire Anemometry - Principles and Signal Analysis (Hardcover, New)
H.H. Bruun
R7,104 Discovery Miles 71 040 Ships in 12 - 19 working days

This is the most up-to-date, comprehensive, and practical book on the subject available, explaining the concepts and related practical implementations of all major hot-wire anemometry applications. It introduces the logical framework for a computer-based HWA system and identifies the individual steps in the complete experimental procedure, ranging from probe selection to the presentation of analysed data. This major work will be invaluable as a reference for students, engineers, and researchers engaged in the field.

Application of System Identification in Engineering (Paperback, 1988 ed.): H.G. Natke Application of System Identification in Engineering (Paperback, 1988 ed.)
H.G. Natke
R2,981 Discovery Miles 29 810 Ships in 10 - 15 working days

System identification is a powerful tool in engineering. Its various methods in the frequency and in the time domain have been extensively discussed in earlier "CISM" courses. The aim of this course is to describe the state of the art in specific application areas, such as estimation of eigenquantities (in the aerospace industry, in civil engineering, in naval engineering etc.), noise source detection, fault detection by investigation of dynamic properties, such as machine sound characteristics, and the identification of the dynamic behaviour of flow induced systems (e.g. aerolastic problems). Geotechnical applications are also among the fields of interest. The lecture notes contain demonstrations of several methods and include a valuation by combining various kinds of experience. Such complex information includes not only theoretical aspects of identification but also advice on practical handling, for example concerning testing effort and data handling.

Fluid Mechanics Measurements (Hardcover, 2nd edition): R. Goldstein Fluid Mechanics Measurements (Hardcover, 2nd edition)
R. Goldstein
R10,687 Discovery Miles 106 870 Ships in 12 - 19 working days

This revised edition provides updated fluid mechanics measurement techniques as well as a comprehensive review of flow properties required for research, development, and application. Fluid-mechanics measurements in wind tunnel studies, aeroacoustics, and turbulent mixing layers, the theory of fluid mechanics, the application of the laws of fluid mechanics to measurement techniques, techniques of thermal anemometry, laser velocimetry, volume flow measurement techniques, and fluid mechanics measurement in non-Newtonian fluids, and various other techniques are discussed.

Instrumentation: A Reader - A reader (Paperback, New edition): R. Loxton, P. Pope Instrumentation: A Reader - A reader (Paperback, New edition)
R. Loxton, P. Pope
R1,641 Discovery Miles 16 410 Ships in 10 - 15 working days

This book contains a selection of papers and articles in instrumentation previously pub lished in technical periodicals and journals of learned societies. Our selection has been made to illustrate aspects of current practice and applications of instrumentation. The book does not attempt to be encyclopaedic in its coverage of the subject, but to provide some examples of general transduction techniques, of the sensing of particular measurands, of components of instrumentation systems and of instrumentation practice in two very different environments, the food industry and the nuclear power industry. We have made the selection particularly to provide papers appropriate to the study of the Open University course T292 Instrumentation. The papers have been chosen so that the book covers a wide spectrum of instrumentation techniques. Because of this, the book should be of value not only to students of instrumen tation, but also to practising engineers and scientists wishing to glean ideas from areas of instrumentation outside their own fields of expertise. In recent years instrumentation has emerged as a discipline in its own right rather than as an adjunct to traditional science and engineering disciplines. This development has been driven partly by the needs of industries for new and improved sensing techniques, and partly by new technological developments such as microprocessors, optical fibres and in tegrated silicon sensors which are revolutionising sensing and signal processing practice."

Sensors for Diagnostics and Monitoring - Devices, Circuits, & Systems (Hardcover): Kevin Yallup, Laura Basirico Sensors for Diagnostics and Monitoring - Devices, Circuits, & Systems (Hardcover)
Kevin Yallup, Laura Basirico; Series edited by Krzysztof Iniewski
R4,474 Discovery Miles 44 740 Ships in 12 - 19 working days

Sensor technologies and applications are evolving rapidly driven by the demand for new sensors for monitoring and diagnostic purposes to enable improvements in human health and safety. Simultaneously, sensors are required to consume less power, be autonomous, cost less, and be connected by the Internet of Things. New sensor technologies are being developed to fulfill these needs. This book reviews the latest developments in sensor technology and gives the reader an overview of the state-of-the-art in key areas, such as sensors for diagnostics and monitoring. Features Provides an overview of sensor technologies for monitoring and diagnostics applications. Presents state-of-the-art developments in selected topics for sensors that can be used for monitoring and diagnostics in future healthcare, structural monitoring, and smart environment applications. Features contributions from leading international experts in both industry and academia. Explores application areas that include medical diagnostics and screening, health monitoring, smart textiles, and structural monitoring.

Cyber-Physical Systems - From Theory to Practice (Hardcover): Danda B. Rawat, Joel J. P. C. Rodrigues, Ivan Stojmenovic Cyber-Physical Systems - From Theory to Practice (Hardcover)
Danda B. Rawat, Joel J. P. C. Rodrigues, Ivan Stojmenovic
R3,931 Discovery Miles 39 310 Ships in 12 - 19 working days

Although comprehensive knowledge of cyber-physical systems (CPS) is becoming a must for researchers, practitioners, system designers, policy makers, system managers, and administrators, there has been a need for a comprehensive and up-to-date source of research and information on cyber-physical systems. This book fills that need. Cyber-Physical Systems: From Theory to Practice provides state-of-the-art research results and reports on emerging trends related to the science, technology, and engineering of CPS, including system architecture, development, modeling, simulation, security, privacy, trust, and energy efficiency. It presents the research results of esteemed professionals on cutting-edge advances in cyber-physical systems that include communications, computing, and control. The book consists of eight sections, each containing chapters contributed by leading experts in the field. Each section covers a different area that impacts the design, modeling, and evaluation of CPS, including: Control systems Modeling and design Communications and signal processing Mobility issues Architecture Security issues Sensors and applications Computing issues The book's coverage includes cyber-physical system architecture, mobile cyber-physical systems, cyber-physical systems for intelligent (road/air) transportation, and cyber-physical system applications and standardization. With the CPS field advancing so rapidly, this book is an ideal reference to help researchers, system designers, and practitioners manufacture devices that are compatible with CPS standards. Presenting numerous examples that illustrate practical applications derived from theory, the book is also suitable for use as a textbook in upper undergraduate and graduate-level university courses.

Introduction to PCM Telemetering Systems (Paperback, 3rd edition): Stephen Horan Introduction to PCM Telemetering Systems (Paperback, 3rd edition)
Stephen Horan
R2,918 Discovery Miles 29 180 Ships in 12 - 19 working days

Introduction to PCM Telemetering Systems, Third Edition summarizes the techniques and terminology used in sending data and control information between users and the instruments that collect and process the data. Fully revised, it gives an overall systems introduction to the relevant topics in three primary areas: system interfaces; data transport, timing, and synchronization; and data transmission techniques. Integrating relevant information about the process at all levels from the user interface down to the transmission channel, this will also include how designers apply relevant industry and government standards at each level in this process. Homework problems are included at the end of each chapter.

DC Servos - Application and Design with MATLAB (R) (Paperback): Stephen M Tobin DC Servos - Application and Design with MATLAB (R) (Paperback)
Stephen M Tobin
R2,577 Discovery Miles 25 770 Ships in 12 - 19 working days

Fundamental to the control of mechatronic devices, the servomechanism applies feedback from the device in question to regulate its position, velocity, or some other physical attribute. Successful mastery of servo control requires an understanding of a wide range of engineering disciplines, making it difficult and time-consuming to master it all-and even harder to find an all-encompassing guide that shows you how. DC Servos: Application and Design with MATLAB (R) is designed and written with this problem in mind. It breaks down the practical knowledge required from the various branches of applied science-electrical and mechanical engineering, analog electronics, mechanics, control theory, digital electronics, embedded computing, and firmware design-into a cohesive and usable framework. Today, DC servos are working around the world in countless applications-CD players, ink-jet printers, robots, machining centers, vending machines, eyeglass manufacturing machines, home appliances, and automotive seat positioners, just to name a few. This book balances coverage of theoretical and practical aspects of application and design of DC servomechanisms. It also provides detailed coverage of feedback transducers, particularly the application of optical encoders to real systems. It covers how to use the MATLAB (R) Control System Toolbox specifically for servo design, to make the design process faster and more interactive. It also presents two complete, bench-tested reference designs that can be duplicated using readily available parts, so you can build your own servo and see it in action. Author Stephen M. Tobin is an expert in motion control and electro-optical instrumentation and a respected consultant in the medical device and manufacturing automation communities. In order to instill confidence in the engineers, scientists, students, and hobbyists designing the ever more complex machines of the 21st century, Tobin guides the reader on a short journey through "servo school," imparting his lifelong passion for motion control along the way.

Measurement Technology for Process Automation (Paperback): Anders Andersson Measurement Technology for Process Automation (Paperback)
Anders Andersson
R2,572 Discovery Miles 25 720 Ships in 12 - 19 working days

Almost every industry that use liquids and gas in any form has a need to measure flow, temperature and pressure. This text is a practical guide on how to accurately use these measuring instruments to control processes in manufacturing industries for food, beverages, chemicals, pharmaceuticals, oil, water and waste water, power, etc. With higher prices of raw materials and more severe requirements for safety and environmental issues, there is a growing demand to measure with higher precision. The book includes a number of practical examples from various industries. It discusses how to comply with safety standards regarding measurements and explains how legal control systems apply to measurements. The aim is to help any process industry reduce the risk of high costs and damage to both people and equipment.

Statistical Continuum Mechanics - Course held at the Department of General Mechanics, October 1971 (Paperback, 1971 ed.): E.... Statistical Continuum Mechanics - Course held at the Department of General Mechanics, October 1971 (Paperback, 1971 ed.)
E. Kroener
R1,489 Discovery Miles 14 890 Ships in 10 - 15 working days
Solid-State Radiation Detectors - Technology and Applications (Paperback): Salah Awadalla Solid-State Radiation Detectors - Technology and Applications (Paperback)
Salah Awadalla
R2,122 Discovery Miles 21 220 Ships in 12 - 19 working days

Integrating aspects of engineering, application physics, and medical science, Solid-State Radiation Detectors: Technology and Applications offers a comprehensive review of new and emerging solid-state materials-based technologies for radiation detection. Each chapter is structured to address the current advantages and challenges of each material and technology presented, as well as to discuss novel research and applications. Featuring contributions from leading experts in industry and academia, this authoritative text: Covers modern semiconductors used for radiation monitoring Examines CdZnTe and CdTe technology for imaging applications including three-dimensional capability detectors Highlights interconnect technology for current pixel detectors Describes hybrid pixel detectors and their characterizations Tackles the integrated analog signal processing read-out front ends for particle detectors Considers new organic materials with direct bandgap for direct energy detection Summarizes recent developments involving lanthanum halide and cerium bromide scintillators Analyzes the potential of recent progress in the field of crystallogenesis, quantum dots, and photonics crystals toward a new concept of x- and gamma-ray detectors based on metamaterials Explores position-sensitivity photomultipliers and silicon photomultipliers for scintillation crystals Solid-State Radiation Detectors: Technology and Applications provides a valuable reference for engineers and scientists looking to enhance the performance of radiation detector technology for medical imaging and other applications.

Sensors and Their Applications XII (Paperback): S. J. Prosser, E Lewis Sensors and Their Applications XII (Paperback)
S. J. Prosser, E Lewis
R2,097 Discovery Miles 20 970 Ships in 12 - 19 working days

Sensors and Their Applications XII discusses novel research in the areas of sensors and transducers and provides insight into new and topical applications of this technology. It covers the underlying physics, fabrication technologies, and commercial applications of sensors. Some of the topics discussed include optical sensing, sensing materials, nondestructive monitoring, imaging sensors, system networks, and water quality monitoring.

Capacitive Silicon Resonators - Performance Enhancement Methods (Hardcover): Takahito Ono, Nguyen Van Toan Capacitive Silicon Resonators - Performance Enhancement Methods (Hardcover)
Takahito Ono, Nguyen Van Toan
R3,562 Discovery Miles 35 620 Ships in 12 - 19 working days

Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology. Features Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator. Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor. Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.

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