In a uniform and comprehensive manner the authors describe all
the important aspects of the epitaxial growth processes of solid
films on crystalline substrates, e.g. processes in which atoms of
the growing film mimic the arrangement of the atoms of the
substrate. Emphasis is put on sufficiently fundamental and
unequivocal presentation of the subject in the form of an
easy-to-read review. A large part of this book focuses on the
problems of heteroepitaxy. The most important epitaxial growth
techniques which are currently widely used in basic research as
well as in manufacturing processes of devices are presented and
discussed in detail.
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